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Showing 1 to 20 of 94 for “"optical emission spectroscopy."”.
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Surface layer evolution in glow discharge optical emission spectroscopy.
Glow discharge optical emission spectroscopy (GDOES) is a modem analytical technique for the analysis of the chemical composition of bulk materials and the depth profiling of multi-layer structures. Most research in the use of GDOES has concentrated on developing accurate methodologies for …
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Optical emission spectroscopy of laser induced plasmas containing carbon and transitional metals
The spectroscopic, SEM and Raman measurements on carbon nanotubes under the exact conditions of which OES analysis were made showed that at a pressure of 400 Torr and a flow rate of 200 sccm, the quality and quantity of single-walled carbon nanotubes was the highest.
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CO2 monitoring by optical emission spectroscopy and mass spectrometry for CO2 plasmas
… In this work quadrupole mass spectrometry and optical emission spectroscopy methods are compared. The QMS method was implemented by an SRS Universal Gas Analyzer and the OES method through a Gencoa OPTIX remote spectrometer. These are attached to the Carbon Dioxide Optical Measurement Apparatus …
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Measurement of Electron Density and Temperature in Silicon Microplasma Devices by Optical Emission Spectroscopy
Made available in DSpace on 2017-07-06T18:55:09Z (GMT). No. of bitstreams: 3 Li_Benben_MS.pdf: 998567 bytes, checksum: 7f27365b2d81cd9fa40c84426158d789 (MD5) Li_Benben_MS_ABS.pdf: 11136 bytes, checksum: 1c9a21b27d87b6b38a303fecf27b5f2e (MD5) license.txt: 4813 bytes, checksum: …
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Optical Emission Spectroscopy during Sputter Deposition of CdTe Solar Cells and CuTe-Based Back Contacts
… processes are studied in detail through optical emission spectroscopy. In order to extract plasma parameters, experimental data and simulations were matched together. We could extract excitation temperatures, vibrational temperatures and rotational temperatures of the plasmas. To explain …
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Development of 0 – D argon collisional radiative model conjoined with optical emission spectroscopy for radio frequency plasma
… (RFEA), laser-induced fluorescence (LIF), or optical emission spectroscopy (OES) are often employed for measuring plasma parameters, which can be resource-intensive and time-consuming. Recently, a computational plasma diagnostic technique, collisional radiative model (CRM), has been gaining …
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Investigation of Matrix Effects in the Analytical Performance of Solution Cathode Glow Discharge Coupled to Optical Emission Spectroscopy
Tesis doctoral por compendio de publicaciones
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Plasma optical emission spectroscopy of laser cladding for process control and oxidation behavior of laser clad NbAl alloys
Spectroscopic diagnostics based on the plasma optical emission spectroscopy has been employed in this investigation to infer composition, thickness, and temperature of the clad during laser cladding of Nb-Al-Hf alloys on Nb substrate. Isothermal oxidation behavior of the laser clad NbAl$\sb3$ based …
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Designing experiments to develop measurements for species catalytic recombination using actinometry and optical emission spectroscopy on silicon carbide
Submission published under a 24 month embargo labeled 'U of I Access', the embargo will last until 2025-08-01
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A Novel Method for Confirming the Presence of Volatile Reduced Sulfide Compounds via Inductively Coupled Plasma-Optical Emission Spectroscopy
… the ICP-AES, inductively coupled plasma-atomic emission spectroscopy, which could qualitatively identify the presence of sulfide compounds in drywall. The drywall samples were set up in a natural environment, and the presence of sulfide compounds were tested for with copper coupons. The oxidized …
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Photolytic Laser-Induced Chemical Vapor Deposition for Aluminum Film Growth
… nm) pulsed excimer laser were investigated using optical emission spectroscopy, including time-resolved emission measurements. Position-resolved growth rate measurements were used to investigate film growth kinetics during photolysis of TMA using 248 nm light, and deposited films were analyzed …
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Plasma-assisted deposition of chromium, fluorocarbon and chromium/carbon/fluorine films on glass, polymer and metal substrates
… and characterization of the plasmas was done by optical emission spectroscopy. Fabrication of unique non-body centered cubic (non-BCC) Cr, plasma polymerized fluorocarbon, and optically transparent Cr/C/F thin films were done by non-equilibrium plasma processing.
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Experimental validation of the predicted emergent magnetism in diamagnetic cadmium sulfide (Cds) doped with boron
… We use X-ray diffraction and plasma optical emission spectroscopy to quantify boron doping. We use magnetometry to confirm the presence of magnetic B.
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An investigation into Manganese(2+) interferences and retrospective dose assessment of shelled species using EPR spectroscopy
… and animal habitat. Inductively coupled plasma - optical emission spectroscopy (ICP-OES) was used to determine the Mn²⁺ concentrations in shells of thirteen species. A methodology to quantitatively compare Mn²⁺ concentrations with Mn²⁺ EPR peak intensity in calcified shells was developed as a …
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Chemical studies of plasma etchants used in integrated circuit manufacture
… polymerisation are presented in this thesis. Optical emission spectroscopy with argon actinometry was used as the principle plasma diagnostic. Statistical experimental design was used to model and compare Si and Si02 etch rates in CF4 and SF6 discharges as a function of flow, pressure and …
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Reactive Sputter Deposition of Lithium Phosphorus Oxynitride Thin Films, A Li Battery Solid State Electrolyte
… including examination by x-ray photoelectron spectroscopy (XPS), inductively coupled plasma optical emission spectroscopy (ICP/OES), and spectroscopic ellipsometry. In addition, film density, and the intrinsic stress of the deposited films were also studied. The highest ionic conductivity of …
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Development of in-situ radiometric inspection methods for quality assurance in laser powder bed fusion
… the local part health. This research establishes Optical Emission Spectroscopy (OES) and Short-Wave Infrared (SWIR) imaging radiometric inspection methods that infer the final material state in LPBF. The instruments’ signals are correlated with bulk and local part properties to evaluate prediction …
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N2, O2, and NF3 Dissociation in a Low Frequency, High Density Plasma Source
… and gas dissociation fractions were measured by optical emission spectroscopy (OES), combined with Ar actinometry for various mixes of N2, O2, and NF3 feed gases with Ar at 400 sccm total flow rate in a low frequency (400 kHz), high pressure (4.0 Torr), inductively-coupled toroidal remote plasma …
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Characterization of PET samples processed in an RF oxygen discharge
… output powers of 250 Watts and 500 Watts.</p> <p>Optical emission spectroscopy (OES) was used to characterize the plasma/sample interaction. Spectra were measured from 250 nm to 900 nm during each of the processing sessions.</p> <p>The spectra showed changes depending upon the pressure of the …
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