Global ETD Search
Search theses and dissertations gathered from participating repositories worldwide. Every result links back to the library that holds it. No account is needed.
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Showing 1 to 9 of 9 for “"non-silicon"”.
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Non-silicon Microfabricated Nanostructured Chemical Sensors For Electric Nose Application
… sensor array and data processing technologies. Non-silicon based microfabricatition has been developed for micro-electro-mechanical-system (MEMS) based gas sensors. Novel sensors have been designed, fabricated and tested. Nanocrystalline semiconductor metal oxide (SMO) materials include SnO2, …
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Non-Silicon MOSFETs and Circuits with Atomic Layer Deposited Higher-k Dielectrics
<p>The quest for technologies beyond 14nm node complementary metal-oxide-semiconductor (CMOS) devices has now called for research on higher-k gate dielectrics integration with high mobility channel materials such as III-V semiconductors and germanium. Ternary oxides, such as La2-xYxO3 and LaAlO3, …
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Design and testing of a microvalve capable of precisely controlling low fluidic flow rates
… and for exploration of MEMS devices made from non-silicon materials. We developed and tested a novel microvalve utilizing a passive mechanical membrane that allows for accurate flow rate control over a wide range of inlet pressures, requiring power only to adjust the flow rate. Design …
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Fabrication of high-quality microflexures using micromilling techniques
… mesoscale nanopositioners. A desire to fabricate non-silicon microflexures for more favorable material properties and flexural responses has led MIT's Precision Compliant Systems lab to investigate the use of various metals in the design of mesoscale six-axis HexFlex nanopositioners. Micromilling …
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A fully-integrated multi-watt permanent-magnet turbine generator
… permanent-magnet turbine generator based on silicon MEMS technology envisioned to replace batteries. The air-driven device, supported on gas bearings, has been experimentally shown to deliver 19 mW to matched resistive loads of 0.33 [omega] while operating at a rotational speed of 40 krpm. …
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Deposition of p-type metal oxide semiconductors for large-area electronic display and solar cell applications
… large-area electronics is still dominated by silicon based technologies, which, with their relatively low performance, limits the advance and development of both the display and solar cell industries. This has led to the development of alternative metal oxide technologies. However, whilst very …
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Advanced Epitaxy on 2D Materials for Bottom-up Heterointegration with Low-defects and Membrane Production with High-throughput
… throughput, the need to reduce the high costs of non-silicon semiconductor wafers, and the challenge of effectively integrating multiple functional semiconductor layers without detrimental effects from defects or interfacial states caused by lattice mismatch and disparate thermal expansion …
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Application and analysis of the constant photocurrent method in studies on amorphous silicon and other thin-film semiconductors
… properties of amorphous hydrogenated silicon films (a-Si:H) produced by plasma enhanced chemical vapour deposition (PECVD) in a commercial reactor and hot-wire chemical vapour deposition (HWCVD) in a laboratory setup, are subject to light-soaking and annealing and investigated using …
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Silicon Photonics for All-Optical Processing and High-Bandwidth-Density Interconnects
Silicon photonics has emerged in recent years as one of the leading technologies poised to enable penetration of optical communications deeper and more intimately into computing systems than ever before. The integration potential of power efficient WDM links at the first level package or even …