Global ETD Search
Search theses and dissertations gathered from participating repositories worldwide. Every result links back to the library that holds it. No account is needed.
Results
Showing 1 to 1 of 1 for “"non-planar photolithography"”.
-
Development of soft lithography based non-planar and 3-D photo-patterning techniques
… A collection of new methods for fabrication of photolithography masks that are used in new forms of 3D patterning, such as patterning on non-planar (3D) surfaces and fabricating multi-height (3D) photoresist structures, is presented. The mask fabrication processes utilize novel approaches to …