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Showing 1 to 1 of 1 for “"neutral detector"”.
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Detection of energetic neutral flux emanating from extreme ultraviolet light lithography sources
… to investigate the development of energetic neutral species. The development, and expansion principle, of energetic ions in an EUV plasma is explained with a self-similar hydrodynamic developed by Murakami. This model explains that rapidly accelerated electrons, emitted from destabilized EUV …