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Showing 1 to 1 of 1 for “"near-field microscopy, photon emission, probe, gallium, failure analysis, semiconductors"”.
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Scanning near-field photon emission microscopy
… of fault isolation techniques, like far-field photon emission microscopy (FFPEM), is grossly inadequate for advanced semiconductor technology nodes beyond 65 nm. The fundamental limit on spatial resolution of FFPEM is approximately half the wavelength of the detected photons. The …