Global ETD Search
Search theses and dissertations gathered from participating repositories worldwide. Every result links back to the library that holds it. No account is needed.
Results
Showing 1 to 14 of 14 for “"nanopositioners"”.
-
Dual-stage Thermally Actuated Surface-Micromachined Nanopositioners
<p>Nanopositioners have been developed with electrostatic, piezoelectric, magnetic, thermal, and electrochemical actuators. They move with as many as six degrees of freedom; some are composed of multiple stages that stack together. Both macro-scale and micro-scale nanopositioners have been …
-
Design of a high-speed, meso-scale nanopositioners driven by electromagnetic actuators
… to engineer high-speed, six-axis, meso-scale nanopositioners that are driven by electromagnetic actuators. When compared to macro-scale nanopositioners, meso-scale nanopositioners enable a combination of greater bandwidth, improved thermal stability, portability, and capacity for massively …
-
Design of a novel six-axis metrology system for meso-scale nanopositioners
The purpose of this research is to develop the best possible means and methods of building a six axis metrology system given cost and space constraints. Six axis measurements are a crucial part of precision engineering and characterizing machine performance, however commercially available sensors …
-
Fabrication of high-quality microflexures using micromilling techniques
… for fabricating the flexural body of mesoscale nanopositioners. A desire to fabricate non-silicon microflexures for more favorable material properties and flexural responses has led MIT's Precision Compliant Systems lab to investigate the use of various metals in the design of mesoscale six-axis …
-
Concept synthesis and design optimization of meso-scale, multi-degree-of-freedom precision flexure motion systems with integrated strain-based sensors
… and realize low-cost, high-performance MDOF nanopositioners. The repeatability and accuracy of precision flexure-based instruments depends upon the performance of the flexure mechanism (e.g. bearings, actuators, and structural elements) and a metrology system (e.g. sensors). In meso-scale …
-
Design of parallel flexure systems via Freedom and Constraint Topologies (FACT)
… instance, there is a need to create multi-axis nanopositioners for emerging three-dimensional nano-scale research/manufacturing.
-
Electromagnetic nanopositioner
… low cost alternative to the piezoelectric nanopositioners. Several key features of the electromagnetic nanopositioner are the flux-steering actuator that applies a force linear in both coil current and displacement, replacement of the conventional metal flexures with rubber bearings, as …
-
Design of a digitally actuated, micro-scale Cartesian nanopositioner
… be eliminated from devices such as Cartesian nanopositioners. This thesis presents a novel MEMS Cartesian nanopositioner referred to as DNAT) that is digitally actuated and requires no sensors or feedback (control, yet still provides the accuracy and resolution offered by today's state of the …
-
Boundary condition effects on vibrating cantilever beams
… to many controlled motion systems such as nanopositioners or linear platforms. However, in some applications the stiffness requirements for the devices to function properly and the stiffness requirements for devices to survive outside effects such at vibration or impulse create a conflict …
-
Design of flexure-based motion stages for mechatronic systems via Freedom, Actuation and Constraint Topologies (FACT)
… instance, there is a need to create multi-axis nanopositioners for emerging three-dimensional nano-scale research/manufacturing. Through this work the following contributions were made: (1) the fifty freedom and constraint space types were found that may be used to synthesize both parallel and …
-
Design of a shim for a nanopositioner
… in the scan tip assembly of the nanopositioner. Nanopositioners must maximize precision to successfully produce features of fewer than 100 nm. The kinematic coupling used to place the tool tip is capable of producing a high level of precision across tool changes, assuming the groove mount is held …
-
Nanotechnology: a systems and control approach
… a new paradigm for the systematic design of nanopositioners with specific bandwidth, resolution and robustness requirements is presented. Many tools from modern robust control like nominal and robust H infinity designs and Glover McFarlane designs are exploited for this. The experimental …
-
Design and fabrication of a multipurpose compliant nanopositioning architecture
… range over comparable state-of-the-art compliant nanopositioners. These improvements will remove one of the main hurdles to practical non-IC nanomanufacturing, which could enable advances in a range of fields including personalized medication, computing and data storage, and energy …
-
A modular atomic force microscope for nanotechnology research
… performance of AFMs by combining multiple nanopositioners with different range and bandwidth characteristics. While this and other improvements have made AFM scanners effective for high-speed imaging, out-of-plane sensing has not been developed adequately. Out-of-plane sensing enhances the …