Global ETD Search
Search theses and dissertations gathered from participating repositories worldwide. Every result links back to the library that holds it. No account is needed.
Results
Showing 1 to 17 of 17 for “"nanopositioner"”.
-
Electromagnetic nanopositioner
… design, and control of a new class of magnetic nanopositioner. Applications for this class of positioner include sample positioning for scanning microscopy and interferometry, nanofabrication, vibration cancellation, biological cell tracking/positioning, and beam focusing/steering. The …
-
Design of a shim for a nanopositioner
… is to assist in the development of a low cost nanopositioner by designing a specific component - a shim that is located in the scan tip assembly of the nanopositioner. Nanopositioners must maximize precision to successfully produce features of fewer than 100 nm. The kinematic coupling used to …
-
Design of a digitally actuated, micro-scale Cartesian nanopositioner
… be eliminated from devices such as Cartesian nanopositioners. This thesis presents a novel MEMS Cartesian nanopositioner referred to as DNAT) that is digitally actuated and requires no sensors or feedback (control, yet still provides the accuracy and resolution offered by today's state of the …
-
Design, fabrication, and testing of a three-dimensional monolithic compliant six-axis nanopositioner
… three-dimensional monolithic compliant six-axis nanopositioner. Much of this work was based off of the original two-dimensional HexFlex manipulator created by Prof. Martin Culpepper and a three-dimensional design by Samuel Korb. The compliant mechanism was manufactured from a single sheet of 1/8 …
-
Multi-axis compliant mechanism-based nanopositioner for multi-mode mechanical testing of carbon nanotubes
This thesis documents the design of a multi-axis nanopositioner that addresses a need for carbon nanotube (CNT) instrumentation that is capable of multiple modes of mechanical testing. This nanopositioner is a solution to the need to quantify the mechanical properties of CNTs with the appropriate …
-
Dual-stage Thermally Actuated Surface-Micromachined Nanopositioners
<p>Nanopositioners have been developed with electrostatic, piezoelectric, magnetic, thermal, and electrochemical actuators. They move with as many as six degrees of freedom; some are composed of multiple stages that stack together. Both macro-scale and micro-scale nanopositioners have been …
-
Concept synthesis and design optimization of meso-scale, multi-degree-of-freedom precision flexure motion systems with integrated strain-based sensors
… and realize low-cost, high-performance MDOF nanopositioners. The repeatability and accuracy of precision flexure-based instruments depends upon the performance of the flexure mechanism (e.g. bearings, actuators, and structural elements) and a metrology system (e.g. sensors). In meso-scale …
-
Design and fabrication of a multipurpose compliant nanopositioning architecture
… low average cost multipurpose compliant nanopositioner architecture with high performance integrated sensing. Customized nanopositioner designs can be created in ~~1 week, for <$1k average device cost even in batch sizes of 1-10, with sensing operating at a demonstrated 59dB full noise …
-
Design and engineering of low-cost centimeter-scale repeatable and accurate kinematic fixtures for nanomanufacturing equipment using magnetic preload and potting
… by a micro-vision system and moved by a six-axis nanopositioner until proper alignment is achieved, at which point the fixture position is permanently set by UV light. This thesis presents design rules and insights for design of a general accurate and repeatable kinematic fixture and presents a …
-
Carbon nano-relays for low power switching
… a CN between two contacts through the use of a nanopositioner. The prototype demonstrated pull-off operation and multiple switching. To our knowledge this is the only example to date of a multiple-use NEMs switch that operates with pull-off. Next a wafer integrated device was fabricated. …
-
A modular atomic force microscope for nanotechnology research
… performance of AFMs by combining multiple nanopositioners with different range and bandwidth characteristics. While this and other improvements have made AFM scanners effective for high-speed imaging, out-of-plane sensing has not been developed adequately. Out-of-plane sensing enhances the …
-
Design and development of a two-axis reluctance based actuator for hexflex nano-positioner
… criterion necessary to be incorporated into the nanopositioner system. Due to a correlation disparity between the governing model and the manufactured device, the actuator did not function as predicted and was unusable. Furthermore, after efforts to remedy the problems, the conclusion was reached …
-
Model reference control for ultra-high precision positioning systems
… of the dual solenoid actuator and piezoelectric nanopositioner are derived. The main challenge of designing such positioning systems is to maintain the accuracy and stability in the presence of un-modeled dynamics, plant variations, and parasitic nonlinearities, specifically in this work, the …
-
Flexure-based nanopositioning systems : integrated design and control
… design and control of a novel flexure-based nanopositioner implementation for scanning probe microscopy are presented to illustrate the effectiveness of the approaches discussed in this thesis.
-
Dynamics and Control of Smart Structures for Space Applications
… active vibration control, and a piezoelectric nanopositioner for control of instrumentation. Shape memory alloys are used to control the surface flatness of a prototype membrane structure. As these actuators exhibit a hysteretic nonlinearity, they need their own controller to operate as …
-
A 2 degree-of-freedom SOI-MEMS translation stage with closed loop positioning
This research contains the design, analysis, fabrication, and characterization of a closed loop XY micro positioning stage. The XY micro positioning stage is developed by adapting parallel-kinematic mechanisms, which have been widely used for macro and meso scale positioning systems, to …
-
X-ray microscope performance enhancement through control architecture change
The goal of this thesis is to apply control algorithms to improve the performance of nanopositioning devices used on the beamline in Advanced Photon Source (APS) at Argonne National Laboratory (ANL). A prototype device, better known as the Early User Instrument (EUI) was the subject of this work. …