Global ETD Search
Search theses and dissertations gathered from participating repositories worldwide. Every result links back to the library that holds it. No account is needed.
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Showing 1 to 20 of 182 for “"nanofabrication"”.
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Nanofabrication towards biophotonics
This thesis explores methods for fabrication of nanohole arrays, and their integration into a benchtop system for use as sensors or anti-counterfeit labels. Chapter 1 gives an introduction to plasmonics and more specifically nanohole arrays and how they have potential as label free sensors compared …
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Meniscus Controlled Three-Dimensional Nanofabrication
Synthesis of nanostructures is an area of considerable interest within the field of nanotechnology because of their potential applications in nanoscale devices. Numerous synthesis techniques have been developed for large-scale fabrication of nanostructures. However, most of these techniques lack …
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Nanofabrication using focused ion beam
… size below 10 nm, which makes FIB suitable for nanofabrication. This project investigated the nanofabrication aspect of the FIB technique, with device applications perspective in several directions. Project work included construction of an in-situ FIB electrical measurement system and …
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Nonplanar Nanofabrication via Interface Engineering
This thesis develops a platform for scalable fabrication of suspended, ultrathin nanostructures as building blocks of nanoelectromechanical systems by extending conventional planar techniques to nonplanar designs. We achieve this by engineering interface forces through a patterned molecular …
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Solid state electrochemical processes for nanofabrication
Metallic nanostructures play a defining role in micro and nanotechnology, from interconnects in electronics to electrodes in chemical sensors, batteries, fuel-cells, antennae, plasmonic waveguides in sub-wavelength optics and structural color generation. While the demand for making functional …
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Advanced nanofabrication of thermal emission devices
… reaching the PV diode. This thesis explores the nanofabrication of a 2-dimensional photonic crystal silicon-on-sapphire (SOS) resonant thermal emitter which is now possible to fabricate due to advances in fabrication technology. Initially, the theory behind the SOS resonant thermal emitter which …
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Nanolithography and Nanofabrication Using Hydrogen Silsesquioxane Resists
… resist has proven to be very useful in various nanofabrication processes. The focus of this thesis has been on the development of EBL processes and the investigations of material aspects of HSQ resists. For resolution enhancement, the effects of developer temperatures and substrates have been …
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STM Lateral Micropositioning: A Tool for Nanofabrication
A concentric tube scanning tunneling microscope (STM) has been fitted with a lateral micropositioning device in order to allow imaging of surfaces over a range of a few millimeters. The probe is mounted on a stage which uses the principle of piezoelectric inertial translation to produce a …
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Electro-thermal nanoprobes for nanometrology and nanofabrication
… that inhibit their application towards nanofabrication, including difficulty in maintaining tip shape under harsh conditions, an inability to simultaneously control thermal and electric potentials, and inadequate methods for determining tip-substrate interface temperature. This …
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Three-dimensional nanofabrication with elastomeric phase mask
This dissertation describes the optical techniques for fabricating three-dimensional (3D) nanostructures with diverse structural layouts. The approach, which we refer to as proximity field nanopatterning (PnP), uses conformable, elastomeric phase masks to pattern thick layers of transparent, …
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Dynamic nanometer alignment for nanofabrication and metrology
Future generations of IC fabrication depend in part on continued improvements in lithography. To meet the lithographic challenges posed by 25- nm lithography, a novel through-the-mask, interferometric imaging alignment method is described that has demonstrated detectivity below 1 nm. Approximately …
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AFM-Assisted Nanofabrication using Self-Assembled Monolayers
This study describes the covalent and the electrostatic attachment of molecules, nano-particles, and proteins to patterned self-assembled monolayers. A scanning probe nanografting technique was employed to produce patterns of various sizes, down to 10 nm. Thus, we are able to demonstrate a degree …
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Implosion Fabrication: Rethinking 3D Nanofabrication from First Principles
Micro- and nanofabrication has revolutionized the world by enabling the explosion of ubiquitous electronic products and devices. However, the traditional lithography and deposition methods used in micro- and nanofabrication processes are planar in nature, with limited capacity for creating complex …
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Novel advancements in nanofabrication for photonic crystal applications
The progress of large-area 2D- and 3D-photonic crystals (PCs) at optical and near infra-red frequencies has been limited by fabrication challenges. Periodic nanostructures must be patterned in high-index and crystalline material such as silicon over large areas (mm² to cm²) with reasonable …
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Nano-electro-mechanical systems fabricated by tip-based nanofabrication
… method seamlessly compatible with conventional nanofabrication processes. Polystyrene nanopatterns deposited can serve together with optical lithography patterned mask and transfer both micropatterns defined by optical lithography and nanopatterns defined by the heated AFM tip to silicon. After …
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Accurate nanofabrication techniques for high-index-contrast microphotonic devices
… in design and fabrication. In this work, nanofabrication techniques are developed to address the two main challenges in fabrication of high-index contrast microphotonic devices: sidewall roughness and dimensional accuracy. The work focuses on fabrication of optical add-drop filters based …
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Templated self-assembly of siloxane block copolymers for nanofabrication
Monolayer patterns of block copolymer (BCP) microdomains have been pursued for applications in below sub-30 nm nanolithography. BCP selfassembly processing is scalable and low cost, and is well-suited for integration with existing semiconductor fabrication techniques. The two critical issues are …
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Origami nanofabrication of three-dimensional electrochemical energy storage devices
The Nanostructured (TM) 3D Fabrication and Assembly Process was developed as a novel method of creating three-dimensional (3D) nanostructured devices using two- dimensional micro- and nanopatterning tools and techniques. The origami method of fabrication is a two-part process in which …
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Material selection and nanofabrication techniques for electronic photonic integrated circuits
Electronic-photonic integrated circuits have the potential to circumvent many of the performance bottlenecks of electronics. To achieve the full benefits of integrating photonics with electronics it is generally believed that wavelength-division multiplexing is needed; requiring an integrated …
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