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Showing 1 to 3 of 3 for “"microrelay"”.
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Technological process for the fabrication of a MEMS microswitch actuated by a PZT thin film
The research in the field of microrelay is now oriented to MEMS devices. They offer the possibility of high integration and low cost, exploiting semiconductor technologies. About MEMS microrelay, piezoelectric actuation offers the advantages of low power consumption, low actuation voltage, low …
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Integration of ferroelectric thin films into silicon based microsystems
… development leads to the fabrication of a microrelay, which than was integrated in an high frequency switch. Simulations show that this novel piezoelectric concept reaches a switching level of more than 20 dB up to 20 GHz. Further fabricated microsystems are thin film bulk acoustic …
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Development of In-Plane Compliant Bistable Microrelays
Bistable microrelays have many possible applications and have the potential to reduce the size, weight, power consumption, and cost of products in which they are used. This research outlines the current state of microrelays, presents three new compliant bistable micromechanisms, and characterizes …