Global ETD Search
Search theses and dissertations gathered from participating repositories worldwide. Every result links back to the library that holds it. No account is needed.
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Showing 1 to 20 of 122 for “"micromachining"”.
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Anisotropic etching for silicon micromachining
Silicon micromachining is the collective name for several processes by which three dimensional structures may be constructed from or on silicon wafers. One of these processes is anisotropic etching, which utilizes etchants such as KOH and ethylene diamine pyrocatechol (EDP) to fabricate structures …
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Novel etch-stop materials for silicon micromachining
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1997.
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Polymers for KrF 248 nm Nanosecond Laser Micromachining
… krypton fluoride (KrF) 248 nm nanosecond laser micromachining. Chapter 2 covers preliminary research into the laser micromachining of eleven different kinds of commercial plastic films with different chemical structures and thermal properties. Chapters 3 and 4 discuss the synthesis and …
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Electrochemical and photoelectrochemical micromachining of silicon in HF electroytes
Thesis (Sc. D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1994.
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Laser micromachining of active and passive photonic integrated circuits
… resonators and applications of laser-induced micromachining for photonic circuit fabrication. Two major advantages of laser-induced micromachining are direct patterning and writing on large areas of substrates at high speed following the exposure of laser light, without using complicated …
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Laser Micromachining: An Enabling Technology for Functional Surfaces and Materials
L'abstract è presente nell'allegato / the abstract is in the attachment
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Study of Pulse Electrochemical Micromachining using Cryogenically Treated Tungsten Microtools
Pulse electrochemical micromachining (PECMM) is an unconventional noncontact manufacturing method suitable for the production of micro sized components on a wide range of electrically conductive engineering materials such as metals, semiconductors, and metal matrix composites. Absence of tool wear …
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MODELLING AND SIMULATION MICROMACHINING OF THE ADDITIVELY MANUFACTURED METAL PARTS
This thesis aims to identify the dynamic material and damage model constants for additively manufactured stainless steel 316L and develop models and simulations to study and predict the micro machining process of selective laser melted (SLMed) stainless steel 316L. The influence of heat treatment …
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Variation reduction of a closed-loop precision ceramic micromachining process
This report details the investigation of the micromachining of a TiC.A1203 ceramic using a closed-loop lapping process. Currently the micromachining process laps a ceramic bar with only a priori flatness adjustment. Bar flatness is adjusted prior to the lap using optical measurement of lithography …
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Micromachining and modeling of focused field emitters for flat panel displays
We present a comprehensive study of field emitter arrays with or without an integrated focus electrode. The former configuration is referred to as field emitter with integrated focus (IFE-FEA) or double-gate FEA (DG-FEA). The main application of IFE-FEA is to improve the resolution of field …
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Fabrication and material characterization of silver cantilevers via direct surface micromachining
… we present a mask-less, or direct, surface micromachining process flow with a 250°C thermal budget. The process uses Cabot Corp.'s silver-based conductive ink for the structural layer and PMMA for the sacrificial layer. Several other materials were tested for use as sacrificial inks in …
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Process Optimization and Cost Analysis of Electrochemical Micromachining for Volume Manufacturing
… as stainless steel and titanium. Electrochemical micromachining (ECMM) is a powerful method for manufacturing small channels (~0.1mm) on metal substrates which can be later made into metal microfluidic devices, but so far, it has only been studied in benchtop experiments. Scaling up this process …
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Ultrafast Laser Micromachining for Correction of Thin Optics for Next Generation X-ray Space Telescopes
… the development of implementing ultrafast laser micromachining technology to the correction of thin-shell lightweight high-resolution mirrors for future high performance X-ray space telescopes. The existing fabrication methods cannot achieve the required accuracy for individual mirror segments, …
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Pulsed laser ablation and micromachining of 4H and 6H SiC wafers for high-temperature MEMS sensors
… polytypes were studied using pulsed lasers and micromachining results were presented. The study shows the possibility of these devices capable of operating in harsh environments.</p>
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Design, simulation, and testing of a low cost laser micromachining system for flexible and rapid tissue-on-chip fabrication.
This study introduces a novel approach to tissue-on-chip device fabrication using low-cost picosecond laser ablation, addressing critical limitations in current manufacturing methods such as soft lithography, particularly in terms of material compatibility, feature resolution, and scalability. We …
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Developing a Multi-axis Femtosecond Laser Micromachining Platform for Laser Induced Refractive Index Modification: Fiber Bragg Gratings, Waveguides, and Beyond
… development of a multi-axis femtosecond laser micromachining platform. System capabilities were demonstrated by inscribing Fiber Bragg Gratings and waveguides using a 1040 nm laser, extended to 750 nm and 1260 nm with an Optical Parametric Amplifier. Precise control over FBG pitch and length …
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Two Innovative Applications Combining Fiber Optics and High Power Pulsed Laser: Active Ultrasonic Based Structural Health Monitoring and Guided Laser Micromachining
… research topic is "Fiber Optics Guided Laser Micromachining", which uses the fiber delivered pulse laser for material ablation. The objective of the first research topic is to develop a first-of-a-kind technology for remote fiber optic generation and detection of acoustic waves for structural …
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Multilayer Micromachined RF MEMS Filters at Ka and L/S Band For On-Board Satellite Communication Systems
… doctorate thesis focuses on the application of micromachining fabrication technologies for the realization of Radio Frequency (RF) bandpass filters. The work has been inspired and supported by the European Space Agency (ESA) Contract No. 22706/09/NL/GLC of the ARTES 5 Workplan 2008 …
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Design of multiple constriction ratio microfluidic channels for 3D insulator based dielectrophoretic chips
… constrictions within them is undertaken using micromachining and adhesion methods. The micromachining of multiple constrictions is planned out but further work is needed for optimization. A concept for a commercial device is proposed for low cost fabrication of 3D iDEP devices.
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Digital Manufacturing Techniques for Microfluidic Device Fabrication
… costs and time. Techniques such as laser micromachining and 3D printing, specifically stereolithography (SL), are explored in this research. Laser micromachining was used to engrave microchannels onto plastic poly(methyl methacrylate) substrates and the channel dimensions were measured. …
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