Global ETD Search
Search theses and dissertations gathered from participating repositories worldwide. Every result links back to the library that holds it. No account is needed.
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Showing 1 to 15 of 15 for “"microfabrication process"”.
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Laser direct-write fabrication of MEMS
… by the limitations of the state-of-the-art MEMS microfabrication processes such as high cost of equipment ownership, long development time, and limited choice of fabrication material selection and integration. Recent developments in alternate MEMS fabrication processes such as PCB-MEMS, laminate …
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High intensity femtosecond enhancement cavities
… repetition rate to a few kHz. Given that the HHG process is inherently inefficient, with conversion ratios less than 10-5, only a small fraction of the pulse energy is lost in the nonlinear interactions, so it is possible to enhance the pulse intensity in a passive cavity retaining the original …
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Microfabrication of silicon tips for scanning probe microscopy
This thesis investigates the microfabrication of silicon tips for Scanning Probe Microscopy. First, a microfabrication process was developed to produce silicon tips over 100 um height with a sharp apex of ~10–20 nm. To prevent inadvertent contact between the substrate bearing the tip and the sample …
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Development of photochemical etching and its application in fabrication of integrated reflector metal semiconductor metal photodetectors
… and etching form the basis of any microfabrication process. Consequently, there is a lot of interest in the research community to improve and innovate on these crucial steps so as to realize the fabrication of complex devices. Once limited to use as physical photomasks for producing …
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Scanning probe microscopy with inherent disturbance suppression using micromechanical systems
… instead of the probe deflection. A robust microfabrication process with a novel breakout scheme was developed and resulted in 100 % device yield. For imaging, an STM setup with optical readout was built and characterized. The suppression improvement over conventional SPM imaging was …
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Development of a flat-panel x-ray source
… Argonne National Laboratory, with standard microfabrication techniques. The prototype is a 3 x 3 pixel field emission array (FEA), with a pixel size of 225 µm by 225 µm and a pitch of 500 µm. The fabricated cathode was developed using a microfabrication process which allows for individual …
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Design of a high-speed, meso-scale nanopositioners driven by electromagnetic actuators
… and to reduce thermal error motions.A new microfabrication process and design-for-manufacturing rules were generated to integrate multilayer actuator coils and silicon flexure bearings. The process combines electroplating for the copper coils, a silicon dioxide interlayer dielectric, and …
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Super-high-frequency lithium niobate microelectromechanical system resonators
… Chapter 4 will present and describe the microfabrication process of the SHF LiNbO3 MEMS resonators. Finally, Chapter 5 will conclude this research work and suggest some potential future research directions.
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Design, fabrication, experimentation and analysis of high-speed microscale gas bearings
… journal bearing clearances, primarily limited by microfabrication, from which stable bearing operation must first be demonstrated as viable. Theoretical modeling of the gas-lubricated hydrostatic journal bearing presents design charts, a comparative study of existing predictions and investigation …
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Development Of Carbon Based Neural Interface For Neural Stimulation/recording And Neurotransmitter Detection
… as they are readily compatible with the microfabrication process for precise fabrication of microelectrode arrays. By the oxygen plasma treatment of photoresist prior to pyrolysis, we obtained carbon fiber arrays. Good sensitivity in dopamine detection by this carbon fiber arrays and …
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An assessment of the aerodynamic, thermodynamic, and manufacturing issues for the design, development, and microfabrication of a demonstration micro engine
Silicon microfabrication is an established technology for the manufacture of integrated circuits and microelectromechanical systems (MEMS) devices such as pressure transducers and accelerometers. Recent advances in silicon microfabrication technology allow the possibility of designing …
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Micro-Evaporator Design and Investigation of Phase Change in Tailored Microchannels
… applications. The design and modeling approach, microfabrication process and the full testing of the micro-evaporators are a part of this study and are all presented. Two mechanisms are proposed to stabilize the internal flow evaporation. The first mechanism is to establish a temperature gradient …
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Mechanical properties and influences of irradiation in dilute nanograined aluminum alloys
… test technique was used due to many advantages. Microfabrication process was employed to make free standing thin films for creep tests, and DC sputtering was used to deposit a metal layer. The first part of this work concerns the strengthening mechanisms operating in nc-Al alloys which are …
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Uv-liga Compatible Electroformed Nano-structured Materials For Micro Mechanical Systems
UV-LIGA is a microfabrication process realzed by material deposition through microfabricated molds. UV photolithography is conducted to pattern precise thick micro molds using UV light sensitive materials, mostly SU-8, and electroforming is performed to fabricate micro metallic structures defined …
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Electrohydrodynamic Microfabricated Ionic Wind Pumps for Electronics Cooling Applications
… and facilitates an IC compatible and batch process. The main purpose of the work presented here is thus to investigate whether an optimized ionic wind pump employed in an array configuration might exhibit performance comparable to a conventional CPU fan. The manufacturing procedure developed …