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Showing 1 to 1 of 1 for “"microcantilever heater"”.

  1. Design and fabrication of the microcantilever heater for rapid chemical vapor deposition graphene synthesis

    … the design and the fabrication process of the microcantilever heater for rapid chemical vapor deposition (CVD) graphene synthesis. Two types of 300 nm thick catalytic metals, copper and nickel, are integrated into the heater region ranging from 5 by 5 μm to 20 by 12 μm in size. The …

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