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Showing 1 to 1 of 1 for “"mesa etch"”.
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Novel etch studies and passivation techniques on InAs/GaSb superlattice based infrared detectors
… surfaces. During SLS device fabrication the mesa delineation leads to discontinuity of the periodic crystal structure which results in formation of unsatisfied chemical bonds on the etched surfaces and hence enhancing the surface leakage currents. More-over, with the scaling of single pixel …