Global ETD Search
Search theses and dissertations gathered from participating repositories worldwide. Every result links back to the library that holds it. No account is needed.
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Showing 1 to 20 of 786 for “"mems"”.
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Transfer printed mechanical MEMS
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A MEMS thermoelectric generator
… based on micro-electro-mechanical system (MEMS) fabrication technologies. This thesis includes an examination of the current state of the portable power field, followed by an explanation of the thermoelectric effects and the operation of thermoelectric generators. A new analysis of the …
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Gallium nitride MEMS resonators
… coupling, these qualities make GaN ideal for RF MEMS resonators. Hence, GaN technology offers a platform for the seamless integration of low-loss, piezoelectric RF MEMS resonators with high power, high frequency electronics. Monolithic integration of MEMS resonators with ICs would lead to reduced …
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Mems approaches in infrared imaging
… of a novel Microelectromechanical System (MEMS) based infrared detector, that utilizes coefficient of thermal expansion, is discussed. The detector design uses a variety of thermal expansion coefficient materials, including alloys which are connected to ambient through a thermal conducting …
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Optical Actuation of MEMS Devices
The experiments on radiation pressure revealed some unexpected behavior of the beam when toggled by short duration laser pulses. While long duration laser pulses at a power level slightly above the toggle threshold reliably toggled the beam every time, short duration pulses of the same power …
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Commercialization of microelectromechanical systems (MEMS)
Microelectromechanical systems (MEMS), at their core are a set of technologies that employ the processes developed in the integrated circuit (IC) and semiconductor industries to construct electro- mechanical devices. In the case of Microopticelectromechanical systems (MOEMS), optical elements are …
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Server architecture for MEMS characterization
Thesis (S.B. and M.Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1998.
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Mixed regime simulation in MEMS
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Civil and Environmental Engineering, 1998.
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Computer aided macromodeling for MEMS
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1998.
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MEMS Hybrid Electronic Integration: From Micro-Robotic Actuation to Control and Monitoring of MEMS Sensor
… for controlling MicroElectroMechanical Systems (MEMS) in mechatronic systems across different scales. The first project focuses on advancing micro-robotic swarm control through improvements to Field Programmable (FP) MicroStressBots. These micro-robots rely on electrostatic actuation and utilize …
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BPSK system analysis using MEMS filters
… integrated Microelectromechanical Systems (MEMS) filters eliminates the need for off-chip components such as crystal references and Surface Acoustic Wave (SAW) filters. This allows for smaller, low power, high performance, shock hardened radios to be developed. This thesis will examine the …
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MEMS Transducer for Hearing Aid Device
<p>A study of implantable middle ear MEMS piezoelectric transducer for hearing aids was developed. The physical vibration deflection at the tip of the transducer is simulated using finite element method. Further, a study of thermoelastic damping effect of four designed MEMS mirrors used as …
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MEMS Biosensor for Water-Immersed Application
<p>Although many air-based sensing mechanisms exist, not all of them can be applied in the water-based environment. In order to obtain a cell-based biosensor, the sensing method needs to be reliable and repeatable in a liquid environment. Therefore, this study is focused on transforming existing …
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Thermal Microactuators for Microelectromechanical Systems (MEMS)
… microscale in microelectromechanical systems (MEMS). The microactuators developed were tested to determine the magnitude of their deflection and estimate their force. Five groups of thermal microactuators were designed and tested. All of the groups used the geometrically constrained expansion …
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RF-MEMS switches for reconfigurable antennas
… on multiple frequency bands and patterns. RF-MEMS is a promising technology that has the potential to revolutionize RF and microwave system implementation for next generation telecommunication applications. Despite the efforts of top industrial and academic labs, commercialization of RFMEMS …
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Advanced control of MEMS probing devices
… that arise in micro-electro-mechanical systems (MEMS). In particular, it focuses on applications such as nano-positioning, where control design becomes necessary to meet high resolution, bandwidth, and reliability (robustness) demands especially when there is significant model uncertainty and …
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The commercialization of microelectromechanical systems (MEMS)
Microelectromechanical systems (MEMS) comprise a set of technologies for the micromachining and electromechanical integration of sensors and actuators. MEMS allow for the radical miniaturization of such devices, as well as for significant improvements in performance and cost over conventionally …
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Performance measurements of MEMS analysis system
… the motion detection capabilities of a MEMS Analysis System. The thesis describes two motion detection schemes and the experiments that have been carried out to characterize them. It provides detailed analysis of the results, as well as suggestions as to how to improve each method. Most …
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User interface for MEMS characterization system
Thesis (Elec.E.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1999.
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Frequency synthesis using MEMS piezoelectric resonators
… towards realizing a new, commercially viable RF MEMS oscillator and switched array frequency synthesizer. The views expressed in this article are those of the author and do not reflect the official policy or position of the United States Air Force, Department of Defense, or the U.S. Government.
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