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Showing 1 to 1 of 1 for “"mangetron sputtering"”.
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Influence of the plasma chemistry and energetics on the composition and structure evolution of sputtered oxide thin films
… metal oxide thin films deposited by magnetron sputtering in an Ar/O2 atmosphere is investigated as a function of the O2 partial pressure (p(O2)). The previously reported composition of films deposited onto grounded non-intentionally heated substrates was correlated with the dominant positive …