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Showing 1 to 20 of 237 for “"magnetron"”.
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Linear magnetron high deposition rate magnet pack for high power impulse magnetron sputtering
High Power Impulse Magnetron Sputtering (HiPIMS) or High Power Pulsed Magnetron Sputtering (HPPMS) is a magnetron sputtering method that has proven to be a promising ionized physical vapor deposition (PVD) technique, with industrial implementation hindered by low deposition rates. HiPIMS applies …
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Novel components by magnetron sputtering
The advent of the closed field unbalanced magnetron sputtering (CFUBMS)technique has provided a novel method for the production of ultra thick (above50(jm) multilayer coatings, which form free standing foils when removed from thesubstrate. Applications for this method range from the production of …
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Interaction of modes in magnetron oscillators
Thesis (Sc.D.) Massachusetts Institute of Technology. Dept. of Electrical Engineering, 1950.
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Deposition and characterization of magnetron sputtered BCC tantalum
… coatings on steel substrates deposited by DC magnetron sputtering. Deposition of tantalum on steel is of special interest for the protection it offers to surfaces, e.g. the surfaces of gun barrels against the erosive wear of hot propellant gases and the mechanical damage caused by the motion …
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Influence of implementing straps on pulsed relativistic magnetron operation
… effect of applying straps to an A6 relativistic magnetron was conducted to determine potential use in reducing mode competition. Several strap configurations were evaluated against the basic anode-endcap geometry of the A6 magnetron as well as the open anode geometry. The effect of cathode radius …
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An Investigation of Target Poisoning during Reactive Magnetron Sputtering
… so called "target poisoning" during magnetron deposition of TiN in an Ar/N2 atmosphere. Investigations include realtime in-situ ion beam analysis of nitrogen incorporation at the Ti sputter target during the deposition process and the analysis of particle uxes towards and from the …
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Nanotermites multicamadas de Al/NiO sintetizadas por Magnetron Sputtering
… form of multilayer thin films, synthesized by magnetron sputtering of Al / NiO with different stoichiometries. Some compositions have shown released amount of heat of about 1.7 kJ /g, which is somewhat below the maximum achieved by similar compositions, which is around 2.44 kJ /g (YAN et al., …
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Magnetic field optimization for high power impulse magnetron sputtering
"High Power Pulsed Magnetron Sputtering (HPPMS) or High Power Impulse Magnetron Sputtering (HiPIMS) is a promising Physical Vapor Deposition technique with several advantages over DC Magnetron Sputtering (dcMS). HiPIMS has gained a lot of interest in the recent years from the coating industries. …
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Non-uniform emission studies of a magnetron injection gun
… emission non-uniformity of a 96 kV, 40 amp magnetron injection gun (MIG) used in a gyrotron. The accomplishments of this thesis include: Experimental measurement of the azimuthal emission non-uniformity of the MIG gun; Simulation of the beam quality of the MIG gun using MICHELLE 3-D, the …
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Fabrication of smart glass electrochromic device using rf magnetron sputtering
… glass for window glazing application by using RF magnetron sputtering. The oxygen flow rate for the deposition is varied from 10sccm -22sccm which is 25%, 27%, 30%, and 35% of oxygen flow. The structures of WO3 were investigated using X-Ray diffraction, Field effect scanning electron microscopy …
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Reactive DC magnetron sputtering of ultrathin superconducting niobium nitride films
DC reactive magnetron sputtering was used to deposit few-nanometer-thick films of niobium nitride for fabrication of superconducting devices. Over 1000 samples were deposited on a variety of substrates, under various chamber conditions. Sheet resistance, thickness and superconducting critical …
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The microstructure and properties of unbalanced magnetron sputtered CrN[x] coatings.
… current experiments in a rather non-conventional magnetron sputtering parameter window: a combination of a high substrate bias voltage (> -200 V) and a high partial pressure of nitrogen (a multitude of the argon partial pressure). This phase shows a strong {100} preferred crystallographic …
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HIGH EFFICIENCY AXIAL DIFFRACTION OUTPUT SCHEMES FOR THE A6 RELATIVISTIC MAGNETRON
… performance of the well-known A6 relativistic magnetron with radial power extraction through one or more of its cavities can be improved by instead using axial power extraction through a mode-converting horn antenna, resulting in improved efficiency (30% improved to 70%) and greater output …
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Growth, structure and magnetic properties of magnetron sputtered FePt thin films
… of the signal-to-noise ratio. In this study, dc magnetron sputtered FePt thin films on amorphous substrates were inve-stigated. The work is focalized on the correlation between structural and magnetic properties with respect to the influence of deposition parameters like growth mode …
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Ion assisted magnetron sputtering of tantalum thin film deposition and characterization
… of tantalum films during their deposition by magnetron sputtering process, and to gain understanding of the mechanism of the ion-solid interactions during the thin film growth. Tantalum (Ta) exists in two distinct crystallographic phases: a stable [alpha]-phase with a body centered cubic (bcc) …
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Novel saturable absorber devices grown using RF and magnetron RF sputtering
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1999.
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Investigation and Characterization of Composite Silica Aerogel Nanostructures Obtained Via Magnetron Sputtering
… hydrophilic Silica Aerogel (SA) monoliths using magnetron sputtering, with Cu thicknesses of 20 nm, 50 nm, and 100 nm. Leveraging the mesoporous nanostructure of SA, a Cu-sputtered SA nanocomposite was fabricated, creating a non-homogeneous nanocomposite material. Trace amounts of Cu penetrate up …
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High power impulse magnetron sputtering (HIPIMS) : Fundamental plasma studies and material synthesis.
… technology entitled high power impulse magnetron sputtering (HIPIMS) was suggested. The principle of HIPIMS is to utilize impulses (short pulses) of high power delivered to the target in order to generate high amount of metal ions with degree of metal ionization up to 90% and ions with …
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