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Showing 1 to 1 of 1 for “"long displacement"”.
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Integrated Piezoresistive Sensing for Feedback Control of Compliant MEMS
… accurately models the piezoresistive response of long, thin flexures even under complex loading conditions. The model facilitates the design of compliant piezoresistive MEMS devices, which output an electrical signal that directly relates to the device's motion. The piezoresistive flexure model is …