Global ETD Search
Search theses and dissertations gathered from participating repositories worldwide. Every result links back to the library that holds it. No account is needed.
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Showing 1 to 5 of 5 for “"isotropic etching"”.
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Silver (Ag) nanoparticle based masks for the development of antireflection subwavelength structures in GaAs and Si solar cells
… grating structures developed using dry and isotropic etching of semiconductor substrates. Silver (Ag) thin films of different thicknesses are deposited on Silicon (Si) and Gallium Arsenide (GaAs) semiconductor substrates and annealed at different temperatures. Uniform nanoparticles with …
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Field emission from silicon
… the small emitter tip radius. It was achieved by isotropic etching of silicon and low temperature oxidation sharpening of the emitter tips.
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Microfabricated Shear -Sensitive Tactile Sensor: Development and Application
… circuit (IC) and MEMS technologies. KOH etching is used to make the diaphragm. Low-temperature wafer bonding is used to seal the cavities. EPON su-8 is used to construct the mesa. Silicon isotropic etching is used to release PI/Al/PI leads to realize flexible package. An analytical model …
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Structural analysis of the MIT Micro Rocket Combustion Chamber
… used to characterize the role of a secondary isotropic smoothing etch in improving the effective material strength of deep etched surfaces. It was determined that the micro rocket etch was not optimized sufficiently to achieve baseline surface roughness. The role of the secondary isotropic …
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Fabrication of Three-Dimensionally Independent Microchannels Using a Single Mask Aimed at On-Chip Microprocessor Cooling
… and width of a channel that is produced after isotropic silicon etching. This fabrication process is tailored for microfluidic network design, but the capabilities of the process can be applied elsewhere. A characterization of an Alcatel DRIE tool is also presented in order to enhance RIE lag …