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Showing 1 to 1 of 1 for “"ion energy distribution, ion beam etching, space charge neutralization"”.
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Nearly Monoenergetic Positive Ion Beam with Self-Neutralized Space Charge Extracted from a Pulsed Plasma and Its Application
Space charge neutralization of an ion beam extracted from a plasma is crucial for advanced plasma processes which require precise control of the ion flux and the width of the ion energy distribution (IED). In previous studies, filaments thermionically emitting electrons were used for neutralizing …