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Showing 1 to 1 of 1 for “"intermediate oxidation state"”.
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Optical modeling off-stoichiometric amorphous Al2O3 thin films deposited by reactive sputtering
… the chemical composition as well as the intermediate oxidation states of the films. The films’ thickness was measured by X-ray reflectivity (XRR), and the inevitable surface roughness of the films was examined by atomic force microscopy (AFM). Both techniques (XRR and AFM) were useful …