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Showing 1 to 20 of 22 for “"hydrogen plasma"”.
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Radiation emission and absorption in a hydrogen plasma of a laser engine
… processes occurring in a low temperature hydrogen plasma. Some of the fundamental concepts involving ionized gases and collision phenomena are presented, and a rigorous approach is used to show that classical mechanics is quite appropriate to our study. As an application to a laser engine, …
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Wafer surface cleaning for silicon homoepitaxy with and without ECR hydrogen plasma exposure
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1994.
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Removal of tin from exterme ultraviolet collector optics by an in-situ hydrogen plasma
… of a 13.5 nm photon, EUV light must be made by a plasma, rather than by a laser. Specifically, the industrially-favored EUV source topology is to irradiate a droplet of molten Sn with a laser, creating a dense, hot laser-produced plasma (LPP) and ionizing the Sn to (on average) the +10 state. …
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Calculated and measured line intensity ratios of singly and doubly ionized nitrogen atoms in hydrogen plasma
… the Coulomb approximation. Atomic processes in a plasma are discussed, as well as two models (LTE and semi-coronal) which can be used to determine the line intensity ratios of subsequent ionization stages of the same element. Two derivations of line intensity ratio formulae are given, valid under …
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Determination of the Electron Scattering Cross Section in a Dense Hydrogen Plasma by Means of Intense Laser Light
Made available in DSpace on 2014-12-08T22:24:06Z (GMT). No. of bitstreams: 1 6706676.pdf: 4894436 bytes, checksum: ed71cd9617225da5490e02f49b88556f (MD5) Previous issue date: 1966
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Substrate cleaning using a remote hydrogen rf-plasma
… quality. In this work, low temperature remote rf-hydrogen plasma cleaning of II-VI and silicon semiconductor surfaces was investigated as a preparation for subsequent deposition in molecular beam and gas source molecular beam epitaxy environments. The plasma was characterized using mass …
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Mechanisms of layer-transfer related to silicon-on-insulator structures
… to study the mechanisms that affect an efficient hydrogenation process in silicon and to validate a hypothesis concerning the hydrogenation mechanism of pre-implanted silicon wafers under hydrogen-plasma processing. These studies are related to a general process. A trapping layer for hydrogen was …
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Investigation of dense plasma under a strong electric field
A hydrogen plasma of density ~ 1016 cm-3 and electron temperature ~ 200 eV has been investigated under electric fields of 100 to 500 V/cm. A pinch of pinch ratio ~ 3 was found to be hydrodynamically stable for ~ 2~s during which the experiment was performed. A sharp burst of runaway electrons of …
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Plasma Treatment of Zinc Oxide Thin Film and Temperature Sensing Using the Zinc Oxide Thin Film
… thin films, films were treated with oxygen, hydrogen, and nitrogen plasmas. Oxygen plasma treatment improved the crystallinity of zinc oxide thin film. Hydrogen plasma treatments were found very effective in improving the electrical conductivity of the film sacrificing film’s transmittance. …
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Remote Plasma Chemical Vapor Deposition of Zirconium Boride: Growth and Diffusion Barrier Characteristics
… as low as 300°C by a new method: remote hydrogen plasma chemical vapor deposition from the single-source precursor zirconium borohydride, Zr(BH 4)4. Carrying out the deposition in the presence of atomic hydrogen generates films with properties that are far superior to those deposited by …
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Chemical sputtering studies of lithiated ATJ graphite
Plasma Facing Component (PFC) materials are crucial to fusion reactor development. There is no one material that functions as an ideal PFC material. As a result, coatings are applied to control the interaction between plasmas and the PFC material. Lithium wall conditioning treatments in the …
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Determination of the ion distribution function during magnetic reconnection in the versatile toroidal facility with a gridded energy analyzer
… argon atoms. Repetition of the experiment with a hydrogen plasma verified that this scenario is most probable.
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Fabrication and Characterization of Narrow-Stripe Quantum Well Laser Diodes
… at low cost. This technique, referred to as hydrogen passivation, involves exposing laser material to a low energy hydrogen plasma, causing hydrogen ions to bind to charged acceptor and donor atoms. Such binding compensates the electrical activity of these dopant atoms and thereby increases …
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Scale-bridging molecular dynamics simulations of plasma-surface interactions
Plasma processing of materials plays a vital part in electronic, aerospace, automobile, metal manufacturing and biomedical industries. Plasma-surface interactions can be divided into two categories: controlled and erosive. Controlled plasma interactions are used to pattern the surfaces of materials …
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The gridded electromagnet probe
… the electron distribution function in magnetized plasma by exploiting the adiabatic invariance of the electron's magnetic moment with a probe comprising a grid, a collector, and an inertially cooled electromagnet. The electric mirror force of the grid, which is located at the electromagnet throat, …
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H (sub) alpha & Neutral Density Scaling in the Maryland Centrifugal eXperiment
The Maryland Centrifugal eXperiment (MCX) is a hydrogen plasma confinement experiment with a rotating mirror magnetic configuration. This experiment was designed to test the concepts of centrifugal confinement and velocity shear stabilization which may allow scaleability to a fusion reactor. These …
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Mass-spectroscopy and modeling of capacitive coupled hydrogen plasmas
… capacitively coupled, symmetric, hydrogen plasma. Both steady-state operation and the time-prole of the afterglow when RF power is terminated are investigated. Fluxes of the hydrogen ions, H+ , H+2, H+3, at the grounded electrode are measured with an energy-resolved mass …
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Diagnostic Development of Gas Delivery and Viewing System for Analysing the Electric Field Stark Effect on H-Alpha Light Emissions close to a Plasma Excitation Antenna
… fusion requires magnetic confinement of hydrogen plasma (the fourth state of matter) heated to many millions of degrees. Advanced diagnostic tools are used by scientists to probe and understand the physics of such magnetically confined high temperature plasmas. This project describes the …
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Diagnostic Development of Gas Delivery and Viewing System for Analysing the Electric Field Stark Effect on H-Alpha Light Emissions close to a Plasma Excitation Antenna
… fusion requires magnetic confinement of hydrogen plasma (the fourth state of matter) heated to many millions of degrees. Advanced diagnostic tools are used by scientists to probe and understand the physics of such magnetically confined high temperature plasmas. This project describes the …
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