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Showing 1 to 5 of 5 for “"heated cantilever"”.

  1. Heated atomic force microscope cantilever with high resistivity and improved temperature sensitivity for nanotopography sensing

    … force microscope using a high-resistivity (HR) heated cantilever and a previously studied low-resistivity (LR) heated cantilever, with respective heater doping concentrations of 1 x 10^16 cm^-3 and 3 x 10^17 cm^-3. The HR cantilever temperature sensitivity on a 100 nm tall silicon grating …

    uiuc Repository record for Heated atomic force microscope cantilever with high resistivity and improved temperature sensitivity for nanotopography sensing (opens in a new tab)

  2. Design and fabrication of the microcantilever heater for rapid chemical vapor deposition graphene synthesis

    … design and the fabrication process of the microcantilever heater for rapid chemical vapor deposition (CVD) graphene synthesis. Two types of 300 nm thick catalytic metals, copper and nickel, are integrated into the heater region ranging from 5 by 5 μm to 20 by 12 μm in size. The microcantilever …

    uiuc Repository record for Design and fabrication of the microcantilever heater for rapid chemical vapor deposition graphene synthesis (opens in a new tab)

  3. Micrometer-scale chemical analysis using heated AFM cantilever and mass spectrometer

    … chemical analysis method using a heated atomic force microscope(AFM) cantilever and mass spectrometer. Simulations investigate the underlying transport mechanisms within the system and the impact of various design parameters. The way to optimize the system is suggested based on the …

    uiuc Repository record for Micrometer-scale chemical analysis using heated AFM cantilever and mass spectrometer (opens in a new tab)

  4. Fundamentals of heat transfer and thermal-mechanical control for improved atomic force microscopy

    … presents novel atomic force microscope (AFM) cantilevers and cantilever technology that improve the measurement rate and precision of AFM. AFM cantilevers with integrated heater-thermometers can generate and sense heat flows to measure and manipulate matter at the nanometer scale. These heated

    uiuc Repository record for Fundamentals of heat transfer and thermal-mechanical control for improved atomic force microscopy (opens in a new tab)