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Showing 1 to 1 of 1 for “"greyscale photolithography"”.
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Design and applications of 4-yl-(methyl)coumarins and their derivatives
… photoresponsive coumarin monolayer with novel greyscale photolithography masks. The versatility of the coumarin photofuse was demonstrated through simple modifications of the coumarin core to provide access to characterization techniques such as secondary ion mass spectrometry (SIMS) and …