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Showing 1 to 1 of 1 for “"gas discharge source"”.

  1. Auslegung und Charakterisierung eines Extrem-Ultraviolett-Transmissionsmikroskops

    Walter, KonstantinPublikationsserver der RWTH Aachen University2006

    … of the microscope includes a pulsed xenon gas discharge plasma source, a grazing incidence condenser, a Schwarzschild objective and a digital detector. The built up system allows exposure times from 100 ns up. With the EUV-microscope high-contrast and sharp images with lateral resolutions …

    aachen Repository record