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Showing 1 to 3 of 3 for “"gas discharge plasma"”.
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Auslegung und Charakterisierung eines Extrem-Ultraviolett-Transmissionsmikroskops
… of the microscope includes a pulsed xenon gas discharge plasma source, a grazing incidence condenser, a Schwarzschild objective and a digital detector. The built up system allows exposure times from 100 ns up. With the EUV-microscope high-contrast and sharp images with lateral resolutions …
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Ion Energy Characterization Study for Next Generation Semiconductor Lithography Based on Gas Discharge Produced Plasma Technology
Made available in DSpace on 2017-07-06T18:58:52Z (GMT). No. of bitstreams: 3 Spencer_Joshua_B_MS.pdf: 2808256 bytes, checksum: c5110b817658878526ca930884621d64 (MD5) Spencer_Joshua_B_MS_ABS.pdf: 10634 bytes, checksum: 5fa8d89970b067f7b96d32d335b75b68 (MD5) license.txt: 4813 bytes, checksum: …
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Impact of ion-neutral collisions in fluid models of plasma sheath
… self-consistent fluid modeling of argon plasmas in DC discharges, including the sheath regions, is presented. Comparison of the charged species density, electron mean energy, plasma potential and ion velocity profiles with the profiles obtained by other fluid models and the profiles …