Global ETD Search
Search theses and dissertations gathered from participating repositories worldwide. Every result links back to the library that holds it. No account is needed.
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Showing 1 to 20 of 70 for “"fluorocarbon"”.
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Fluorocarbon synthesis in a high-intensity carbon arc
Thesis: Sc. D., Massachusetts Institute of Technology, Department of Chemical Engineering, 1963
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The synthesis of fluorocarbon monomers and polymers by direct fluorination.
Thesis. 1978. Ph.D.--Massachusetts Institute of Technology. Dept. of Chemistry.
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Surface kinetics modeling of silicon oxide etching in fluorocarbon plasmas
Fluorocarbon plasma for silicon oxide etching is a complicated system involving many ion and neutral species. Depending on the plasma condition, many difficulties arise such as RIE lag, etch stop, and low selectivity to photoresist. For a better understanding of the process it is necessary to have …
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Chemical vapor deposition and functionalization of fluorocarbon-organosilicon copolymer thin films
… adhesion to the underlying silicon substrate. Fluorocarbon-organosilicon copolymers are of interest for this application because they have the desirable attributes of both fluorocarbon and organosilicon polymers, such as low dielectric constant, thermal stability, and good adhesion to silicon. …
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Volumetric heat capacity enhancement in ultrathin fluorocarbon polymers for capacitive thermal management
Capacitive thermal management in electronics requires an enhancement in the volumetric storage density of compatible materials to approximately 1 GJ/m3. We investigate potential enhancement in sensible storage density arising from size e ects in thin polymer lms. We design and fabricate a …
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Pulsed plasma enhanced and pyrolytic chemical vapor deposition of fluorocarbon biopassivation coatings
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1997.
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Synthesis and characterization of molecules to study the conformational barriers of fluorocarbon chains
Fluorocarbons are known to be stiffer than their hydrocarbon analogues, a property that underlines the extensive industrial application of fluorocarbon materials. Although there has been previous studies on the rotational barrier of molecules having fluorocarbon centers, a detailed systematic study …
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Low dielectric constant fluorocarbon films containing silicon by plasma enhanced chemical vapor deposition
… and high electromigration resistance. Fluorocarbon films containing silicon (SiCF) have been developed in this work for low-k interlayer dielectric applications below 50 nm linewidth technology. The films were prepared by plasma enhanced chemical vapor deposition (PECVD) using gas …
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Pulsed plasma enhanced chemical vapor deposition of fluorocarbon thin films for dielectric applications
Thesis (Ph.D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1999.
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Chemical vapor deposition of fluorocarbon films for low dielectric constant thin film applications
… filament chemical vapor deposition have produced fluorocarbon films with the potential use as low dielectric constant interconnect materials in microelectronic circuits. Solid-state nuclear magnetic resonance spectroscopy was demonstrated as a valuable film characterization tool to understand …
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Amphiphilic BAB-triblock copolymers bearing fluorocarbon groups : synthesis and self-organization in aqueous media
In this work new fluorinated and non-fluorinated mono- and bifunctional trithiocarbonates of the structure Z-C(=S)-S-R and Z-C(=S)-S-R-S-C(=S)-Z were synthesized for the use as chain transfer agents (CTAs) in the RAFT-process. All newly synthesized CTAs were tested for their efficiency to moderate …
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Beam simulation studies of plasma-surface interactions in fluorocarbon etching of Si and SiO2
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1992.
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Plasma-assisted deposition of chromium, fluorocarbon and chromium/carbon/fluorine films on glass, polymer and metal substrates
… centered cubic (non-BCC) Cr, plasma polymerized fluorocarbon, and optically transparent Cr/C/F thin films were done by non-equilibrium plasma processing.
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Adsorption of Dendritic Fluorocarbon End-Capped Poly(Ethylene Oxide) at an Air-Water Interface – A Synthetic, Analytical and Computational Study
… have shown that functionalizing PEO with fluorocarbon groups can lead to a remarkably large increase in adsorption and evidence has been provided for the formation of brush-like structures at an air/water interface. However the maximum size of the fluorocarbon unit is limited by its …
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Spectroscopic characterisation of novel materials for semiconductor device applications
… the chemical composition, in an industrial fluorocarbon-based plasma etching (FBPE) system. This study was preceded by an investigation of how the chemical composition of a thin fluorocarbon films which forms on a surface in the plasma etcher depends on the C4Fs/Ar/Oz gas feed ratios and the …
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Modeling the micellization behavior of fluorosurfactants using molecular-thermodynamic theory
… two important micelle shapes in the context of fluorocarbon-based surfactants. These models explicitly incorporate the effect of the position-dependent curvature associated with discs and biaxial ellipsoids. Comparison between the models developed here with those that do not explicitly account …
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Fluorination Effect on the Conformational Properties of Alkanes
… are being used to study the flexibility of fluorocarbon chains using emission. We have found that the excimer formation for the fluorinated pyrene monomers is highly dependent on concentration and is less efficient than for pyene. Excimer formation for the fluorinated pyrene dimers is much …
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The role of surface pretreatment and surface analysis in the bondability of carbon fiber-polyimide matrix composites
… transform infrared spectroscopy). Surface fluorocarbon contamination was appreciably reduced with gritblasting, argon plasma and oxygen plasma pretreatments. Specific functional groups were incorporated into the composite surfaces through the choice of gases used in the pretreatment. …
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Preparation, Properties, and Catalytic Activity of Fluorous Phosphine Substituted Transition Metal Carbonyl Complexes
… to probe the effects of ligation by perfluorocarbon substituted tertiary phosphines. W(CO)5{P(n-octyl)3} was prepared to provide a non-fluorous paradigm for W(CO)5{P(CH2CH 2(CF2)5CF3)3}. Infrared and 31P NMR data are compared and contrasted. The X-ray crystal structure of W(CO)5{P(p-C6H …
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Fabrication of natural and magnetic slippery surfaces
… implants. However, most LIPS are made of toxic fluorocarbon materials. In this work, in order to eschew toxic fluorocarbon materials, we designed several LIPS made from natural hemp products. The first is an all-natural LIPS made from hemp fibers, which could help reduce or eliminate liquid food …
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