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Showing 1 to 3 of 3 for “"fluorine chemistry"”.

  1. Surface kinetics modeling of silicon oxide etching in fluorocarbon plasmas

    Kwon, Ohseung, 1969-Massachusetts Institute of Technology2004

    … systems including silicon etching with chlorine chemistry, silicon oxide etching with fluorine chemistry and silicon oxide etching with fluorocarbon plasma. The verification of the model was done using measured etching yield data determined by quartz crystal microbalance (QCM) in conjunction with …

    mit Repository record

  2. Properties of [SF3][MF6] (M = Sb, As), WOF4 derivatives, 1-ethyl-3-methylimidazolium bifuoride, perfluorocarboxylic acids and perfluorocarboxylates

    Chaudhary, Praveen, University of Lethbridge. Faculty of Arts and Science2016

    lethbridge

  3. Topochemical Manipulation of Layered Perovskites

    Josepha, Elisha A

    … (where M = Fe, Ni), a structure open to further chemistry. The next step involved reductive intercalation with Rb or Cs metal to form the air sensitive mixed-valence products with the nominal compositions, A1.5M0.5LaNb2O7. The last step involved the oxidative intercalation of chlorine using …

    uno Repository record