Global ETD Search
Search theses and dissertations gathered from participating repositories worldwide. Every result links back to the library that holds it. No account is needed.
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Showing 1 to 11 of 11 for “"etch mask"”.
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Graphene etch mask for silicon
… its mechanical and chemical strength as an etch mask for silicon is tested.We attempt to present the progress toward a working model of a graphene etch mask. The influence of the mask geometry, etch method, etch conditions, substrate quality and other factors will be explored to present a …
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Electrohydrodynamic jet printing: droplet to shape writing, and potential applications with 172nm exposure
… pattern biologically active chemicals, draw an etch mask, connect complex geometry microscale wires, or one of many other applications, EJET has a place in R&D. Significant effort or training is required to write 500nm-30um droplets, let alone to coalesce droplets into shapes/lines. This thesis …
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Sub-20nm substrate patterning using a self-assembled nanocrystal template
… Four methods of templated patterning - shadowmasking, lift-off, selective ablation & nano-imprinting - using the quantum dot self-assembled monolayer are proposed and explored. The nano-imprinting technique is used to produce the smallest pattern in anodized alumina to date. The use of this …
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Pathways for quantum dot optoelectronics fabrication using soft nanoimprint lithography
… concept, a dense array of nano-sized holes are etched into a blank GaAs substrate. When a thin InAs quantum dot (QD) layer is grown on top, the QDs nucleate only at the locations of the holes, resulting in an array of site-controlled quantum dots. This concept shall be called “regrown QDs.” In …
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Light-matter interactions in all-dielectric silicon nanoresonators
… to form monolayer nanospheres which act as an etch mask to form the dielectric nanoresonators. In the first part of the thesis, the coupling of light in these resonators producing low-reflectivity at optical frequencies which coincides with the numerical design simulations is demonstrated. …
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Templated self-assembly of siloxane block copolymers for nanofabrication
… dimension of 14 - 18 nm. These can be used as an etch mask or an easily removable template for patterning functional materials. Solvent vapor treatments can tune the pattern dimension and morphology. Different degrees of solvent uptake in BCP films during solvent-annealing can manipulate the …
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The fabrication and market analysis of lattice mismatched devices
… eliminated the need for complicated metal etch steps by using a lift-off process and deposited contact metal as an etch mask. Selecting etches that highlight the selectivity of the device layers was critical to the success of the process. In addition to developing a process to fabricate a …
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Nano-electro-mechanical systems fabricated by tip-based nanofabrication
… by a heated AFM tip can serve directly as etch mask and transfer the nanopatterns to solid-state materials such as silicon and silicon oxide through one step of etching, solving the first challenge for NEMS device fabrication using TBN; second, we developed a process that makes this TBN …
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Analysis of Mo sidewall ohmic contacts to InGaAs fins
… contacts. The key step is that the fin etch mask on top of InGaAs is not removed and the metal (Mo) is sputtered so that InGaAs is contacted by the Mo only through the sidewall. Therefore, only a sidewall contact is made without a top contact. Also, to investigate the way to improve the …
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Dry etching processes for ferroelectric capacitors
Dry etching processes for patterning of ferroelectric thin films using environmental benign etching gases was developed. The PbZr<sub>x</sub>Ti<sub>1-x</sub>O3 (PZT) and RuO<sub>2</sub> films were patterned using CHCIFCF<sub>3</sub> and O<sub>2</sub>. Selective etching between PZT and …
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Scaling study of phase change memory using carbon nanotube electrodes
… electrically addressable CNTs using Cu as an etch mask. We also studied AlOx-based resistive random access memory with CNT crossbar electrodes. We showed both metallic and semiconducting CNTs would effectively switch AlOx bits and demonstrated ON/OFF ratios up to 105 with programming currents …