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Showing 1 to 4 of 4 for “"energy distribution measurements"”.
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A Novel Device for Energy Distribution Measurements in an RF Plasma Discharge
Made available in DSpace on 2017-07-06T18:55:37Z (GMT). No. of bitstreams: 3 Nguyen_Phi_L_MS.pdf: 81580042 bytes, checksum: 3c7b14f053dfe7315d8732f2a80e9f8d (MD5) Nguyen_Phi_L_MS_ABS.pdf: 501973 bytes, checksum: 470486c7d05ab468f109e27a45f04fc8 (MD5) license.txt: 4813 bytes, checksum: …
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Energy distribution measurements of magnetically trapped spin polarized atomic hydrogen : evaporative cooling and surface sticking
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Physics, 1991.
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Energy Distribution of Sputtered Neutral Atoms from a Multilayer Target
Energy distribution measurements of sputtered neutral particles contribute to the general knowledge of sputtering, a common technique for surface analysis. In this work emphasis was placed on the measurement of energy distribution of sputtered neutral atoms from different depths. The liquid Ga-In …
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Enhancing retarding potential analyzer energy measurements with micro-aligned electrodes
… Analyzer (RPA) is a sensor that measures the ion energy distribution of a plasma. The ion energy influences the ablation of surfaces, or plasma etching, as well as the deposition processes. Integrated circuit foundries could greatly benefit from a diagnostic tool such as an RPA in plasma chambers. …