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Showing 1 to 20 of 22 for “"energetic ions"”.
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Nonequilibrium electron dynamics under energetic ions or electrons irradiation
Submission published under a 24 month embargo labeled 'U of I Access', the embargo will last until 2027-08-01
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Magnetic mitigation of energetic ions for extreme ultraviolet lithography sources
… Instead, it must be produced by highly-ionized, energetic (20-30eV) plasmas. Additionally, no materials are known to easily transmit EUV. All EUV light must be collected by a collector optic mirror, which cannot be guarded by a window. The plasmas used in EUV lithography sources expel high-energy …
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Non-adiabatic electron-ion dynamics in semiconductors under ionizing particle irradiation
Highly energetic ions have broad applications from semiconductor industry to medicine. However, as they impact materials, they inevitably cause damage, which fundamentally determines the materials' properties. Hence, the success of these applications relies on quantitative understanding of how …
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Using Machine Learning to Generate a Surrogate Model for Plasma-Surface Interactions
Plasma-surface interactions are an important effect in laboratory plasmas, but too complicatedto be modelled directly in plasma simulations. However, plasma surface interactions can be modelled by Transport and Range of Ions in Matter (TRIM) simulations based on a binary collision approximation of …
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Theory and application of planar ion traps
… on printed circuit boards with macroscopic ions, allowing us to study the traps while avoiding the experimental challenges of atomic ion traps. We discuss the dynamics of ions in the traps using both numerical and analytical means. Scalable traps are of interest to the quantum computing …
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A study of reversed shear Alfvén eigenmodes in Alcator C-Mod with phase contrast imaging
… geometry tends to focus the Alfvén waves in regions of near uniformity defined by local extrema in the Alfvén continuum, a quantity which describes the local Alfvén resonance frequency for particular mode numbers. Modes excited in the vicinity of these near uniform regions may be weakly damped …
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First on-line mass measurements at SHIPTRAP and mass determinations of neutron-rich Fr and Ra isotopes at ISOLTRAP
… parts: (i) a gas cell for stopping the energetic ions from SHIP, (ii) radiofrequency quadrupole structures to cool and to bunch the ions extracted from the gas cell, and (iii) a superconducting magnet with two cylindrical Penning traps at a field strength of 7 T. In this work the Penning …
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High-resolution studies of charge exchange in supernova remnants with Magellan, XMM-Newton, and Micro-X
… from a neutral atom to an excited state in an energetic ion, can occur in plasmas where energetic ions are incident on a cold, at least partially neutral gas. Supernova remnants, especially in the immediate shock region, provide conditions conducive to charge exchange. The emission from post …
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Experimental measurements and numerical modeling of fast-ion distributions in the Alcator C-Mod Tokamak
… modeling of minority heated fast-ion distributions in the Ion Cyclotron Range of Frequencies (ICRF) on the Alcator C-Mod tokamak. Analysis of fast-ions >100Te is important for both ITER and a future fusion reactor as both will have a significant population of 3.5 MeV alpha particles generated …
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UNDERSTANDING ION SPECTRAL DYNAMICS NEAR THE INNER EDGE OF THE PLASMA SHEET
… fields. During the last few decades, several missions have recorded the presence of dynamic spectral features of energetic ions in in situ measurements, which represent the observational signatures of ion transport, acceleration, and loss in the inner magnetosphere. These ion spectral features …
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Measurement and interpretation of stable and unstable Alfvén eigenmodes in the presence of fast ions in Alcator C-Mod
… damped resonant eigenmodes in the presence of energetic ions is studied in Alcator C-Mod. Global Alfven eigenmodes (GAEs) can exist at frequencies between the continua of adjacent poloidal mode numbers to avoid strong continuum damping. Toroidicity-induced Alfven eigenmodes (TAEs) exist in gaps …
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Vielteilchensimulation von Atomclustern in intensiven Laserfeldern
… and solids. These results include production of energetic electrons, XUV radiation and X-rays, highly charged energetic ions and neutrons from nuclear fusion Theoretical explanations of these findings are based on different approaches, many of which rely on the model of a cluster as a spherical …
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An experimental study of stopping powers for ions of intermediate atomic studies
Submitted by William Weathers (weathrs2@illinois.edu) on 2012-04-22T18:10:13Z No. of bitstreams: 1 1975_bucher.pdf: 4464437 bytes, checksum: 4f6e1a9b761c805241512af16b382666 (MD5)
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Diagnosis of the flux emanating from the intermediate focus of an extreme ultraviolet light lithography source
… EUV light lithography tools, the transport of energetic species that can damage post-intermediate focus optics and increase the cost of tool ownership. In this paper, the effects of chamber pressure, buffer gas mass, and pinch gas mass on debris transport will be explored using the XTREME XTS …
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Mechanical stresses upon phase transitions
… due to their interesting technological applications. In this work three different groups of coatings were studied. Transition metal oxides are used as optical coatings, hard coatings, etc., phase change films find application in optical data storage technology, while optically switchable …
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Detection of energetic neutral flux emanating from extreme ultraviolet light lithography sources
… for further reduction in circuitry dimensions. One of the most promising techniques for the next generation of lithography is extreme ultraviolet light lithography (EUVL) technology. This technique improves upon currently used excimer laser lithography by reducing the light source …
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Studies of the dissociation and energetics of gaseous ions
… ion coincidence mass spectra, enables fragment ions formed by dissociative single, double, and triple ionization, to be distinguished and quantified. Relative partial ionization cross sections (PICS) and precursor specific relative PICS are derived for the formation of positively charged …
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A statistical study of plasmawaves and energetic particles in the outer magnetosphere
The Earth magnetosphere contains energetic particles undergoing specific motions around Earth's magnetic field, and interacting with a variety of waves. The dynamics of energetic particles are often described in terms of three kinds of adiabatic invariants. Energetic electrons are often unstable to …
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Cleaning of tin debris by reactive ion etching in a discharge-produced EUV plasma source
… in vacuum. During the light generation process, energetic ions or neutral debris are emitted from the plasma in addition to the desired light. The contamination by such debris will critically affect the life time of the mirror as well as the total light output. The contamination by debris is more …
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Removal of tin from exterme ultraviolet collector optics by an in-situ hydrogen plasma
… wavelength has required extra innovations and steps that increase fabrication time, cost, and error. These innovations include immersion lithography and double patterning. Currently, the industry is at the 14 nm technology node. Thus, the minimum feature size is an order of magnitude …
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