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Showing 1 to 1 of 1 for “"elektro-thermische modelle"”.
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Model order reduction of electro-thermal MEMS
The modeling of electro-thermal processes, for example Joule heating, is becoming increasingly important in microsystems (in the following MEMS) development. In microelectronic systems, for example, high temperatures may cause the malfunction or even destruction of the device. Other devices, such …