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Showing 1 to 2 of 2 for “"electrothermal actuation"”.
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An electrothermally-actuated bistable MEMS relay for power applications
… which is then combined with transient electrothermal actuation and contact structure to develop a MEMS relay for power switching. The relay components, fabricated by a through etch of a silicon wafer using deep reactive ion etch (DRIE), move laterally in the plane of the wafer. The …
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Analysis of hybrid electrothermomechanical microactuators with integrated electrothermal and electrostatic actuation
The goal of this research is to integrate electrothermal and electrostatic actuation in microelectromechanical systems (MEMS). We look at cases where these two types of actuation are intimately coupled and argue that such integrated electrothermomechanical microactuators have more advantages than …