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Showing 1 to 1 of 1 for “"electrostatically actuation"”.
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Model mismatch paradigm for probe based nanoscale imaging.
… models and characterization methodology for an electrostatically actuated MEMS cantilever with an integrated solid state thermal sensor. Appropriate modeling assumptions are made to delineate various nonlinear forces on the cantilever viz. electrostatic force, tip-sample interaction force and …