Global ETD Search
Search theses and dissertations gathered from participating repositories worldwide. Every result links back to the library that holds it. No account is needed.
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Showing 1 to 3 of 3 for “"electrostatic comb drive"”.
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Electrically tunable terahertz quantum cascade lasers
… electrically tunable THz QCLs. One is the electrostatic comb drive actuated tuner design and the other one is a two-stage flexure design that is actuated by an external piezo nano-positioning actuator. The MEMS tuner devices are all fabricated using standard foundry process SOIMUMPs from …
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One-Dimensional MEMS Optical Phased Array Systems Based on Surface Micro-Machined Silicon Mirrors for Scanning LiDAR Applications
… actuated at low voltage by a separate electrostatic parallel plate actuator. The field of view obtained by the prototype is measured as 4.76°. The low-mass micromirrors have a response time of 6.5 µs and an out of plane actuation stroke of 0.16 µm at a dc bias voltage of 55 V which is …
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Advanced control of MEMS probing devices
… device with electrically separated sensing combs and driving combs. The system is identified through experimental input-output data and the hardware is setup in such a way that the resulting model is a linear time-invariant model with appropriate choice of variables even when the the …