Global ETD Search
Search theses and dissertations gathered from participating repositories worldwide. Every result links back to the library that holds it. No account is needed.
Results
Showing 1 to 20 of 25 for “"electron cyclotron resonance"”.
-
Numerical modeling of electron cyclotron resonance plasma
The semiconductor industry is introducing electron cyclotron resonance (ECR) plasma reactors as reliable wafer etching tools. This industry requires radially uniform etching rate and radially uniform etching anisotropy. The etching rate and etching anisotropy depend on the ECR plasma properties.
-
Copper metallization with an electron cyclotron resonance
An "electron cyclotron resonance" plasma source, used for physical vapor deposition of copper into sub-micron features, was studied to determine whether parameters, such as gas atom density, electron density and temperature, surface bias, and copper ionization fraction at the deposition surface, …
-
Low temperature epitaxial silicon growth using electron cyclotron resonance plasma deposition
… high purity wafers are not used. We have used electron cyclotron resonance (ECR) plasma deposition to grow high quality epitaxial silicon films on silicon wafers. This growth technique relies on the deposition of silicon from a highly energetic hydrogen and silane plasma. The presence of the …
-
Analysis of low-energy neutral hydrogen fluxes using an electron cyclotron resonance-heated discharge
This dissertation describes the design, construction, and proof-of-principle verification of a neutral hydrogen flux detection system, based on an ECRH discharge as the neutral flux ionizer. The significant features of the ionizer are its small size and simultaneous excitation of the ECRH mode …
-
Plasma characterisation of an electron cyclotron resonance ion source by means of x-ray spectroscopy
… aim of any multiply-charged ion source, like the Electron Cyclotron Resonance Ion Source, ECRIS, is the production of multiply-charged ions, in sufficiently large quantities. These multiplycharged ions, in the case of the ECRIS, are created by a step-by-step ionisation process, whereby neutral …
-
Consequences of Mode Structure on Plasma Parameters in Electron Cyclotron Resonance Sources used for Materials Processing
Made available in DSpace on 2017-07-06T18:49:02Z (GMT). No. of bitstreams: 3 Kinder_Ronald_L_MS.pdf: 55983630 bytes, checksum: 14b73a0c7b164993c74cc15004434846 (MD5) Kinder_Ronald_L_MS_ABS.pdf: 637320 bytes, checksum: c1708001642b4606ece902c468dd5af2 (MD5) license.txt: 4813 bytes, checksum: …
-
Investigation on the Microwave-based techniques to improve the performances of the Electron Cyclotron Resonance Ion Sources
Le sorgenti di ioni di tipo ECR (Electron Cyclotron Resonance) si sono rivelate molto importanti per la produzione continua ed affidabile di fasci intensi di ioni ad alto stato di carica destinati alle facilities di acceleratori di particelle. Recentemente, nuove tecniche sono state sviluppate per …
-
Design and testing of an electron cyclotron resonance heating ion source for use in high field compact superconducting cyclotrons
… injection of a high brightness beam from an Electron Cyclotron Resonance ion source into a high magnetic field cyclotron. Axial injection from an ion source with high brightness is important to reduce particle losses in the first several turns of acceleration within the cyclotron. Beam …
-
Preparation and characterization of in situ deposited metal-insulator-III-V semiconductor devices
… ultrahigh vacuum conditions. The technique of electron cyclotron resonance plasma-assisted deposition was used for the deposition of $\rm Si\sb3N\sb4$ and Si.
-
A hybrid hydrodynamic-Monte Carlo simulation of the transport of neutral radicals in low-pressure remote plasma sources
In low pressure electron cyclotron resonance and remote plasma enhanced chemical vapor deposition reactors (milliTorr to hundreds of milliTorr) the mean free path of excited state neutrals can be commensurate with the vessel dimensions. Deposition species may collide with the wall several times …
-
Multiple frequency electron cyclotron heating for the Levitated Dipole Experiment
The use of multiple frequencies of electron cyclotron resonance heating (ECRH) in the Levitated Dipole Experiment (LDX) is an important tool that will tailor the plasma profiles. Initial LDX plasmas have been created using 2.45 GHz and 6.4 GHz, both at up to 3 kW. The construction and calibration …
-
Dynamic nuclear polarization in biomolecular solid state NMR : methods and applications in peptides and membrane proteins
… by dynamic nuclear polarization (DNP), in which electron polarization is transferred to nuclei. We present applications of magic angle spinning NMR that demonstrate its utility for the determination of structure at atomic resolution. We then present new techniques and instrumentation for DNP that …
-
A continuous-wave second harmonic gyrotron oscillator at 460 GHz
… 230 GHz) and second harmonic (near 460 GHz) of electron cyclotron resonance. During operation in a complete CW regime with 12.4 kV beam voltage and 135 mA beam current, the gyrotron generates a record 8 W of power in the second harmonic TE0,6,1 mode at 458.6 GHz. Design at high frequency, second …
-
Studies on the dynamics of limited filaments
… creates long filaments (-6 meters) using electron cyclotron resonance heating (ECRH) and a toroidally symmetric solenoid. The other utilizes a newly constructed Argon plasma gun breaking down injected gas for creating short (~1 meter) plasma filaments. Arrays of Langmuir probes track the …
-
Self-consistent Monte Carlo simulations of plasma processing reactors
… of a plasma exceeds 10$\sp{-5}- 10\sp{-4}$, electron-electron (e-e) collisions become important. These collisions cause the electron energy distribution (EED) to approach a Maxwellian distribution. Electron cyclotron resonance (ECR) reactors for etching and deposition have a high plasma …
-
Equilibrium and stability studies of plasmas confined in a dipole magnetic field using magnetic measurements
… in deducing the correct beta values for the electron cyclotron resonance heated (ECRH), anisotropic LDX plasmas. The simpler isotropic models give accurate spatially integrated quantities of the pressure profile. The reconstruction of LDX plasmas requires overcoming unique obstacles. Because …
-
The gridded electromagnet probe
We attempted to measure the anisotropy in the electron distribution function in magnetized plasma by exploiting the adiabatic invariance of the electron's magnetic moment with a probe comprising a grid, a collector, and an inertially cooled electromagnet. The electric mirror force of the grid, …
-
Theoretical and experimental studies of the ITER ECRH polarizer and rotator gratings
Electron Cyclotron Resonance Heating (ECRH) will be one of the major heating and current drive mechanisms for the ITER fusion experiment. A pair of reflection grating polarizers will be used in the ECRH high power microwave transmission lines to generate the required elliptically polarized …
-
Monolithic integration of 1.55 micron photodetectors with GaAs electronics for high speed optical communications
Integrated optoelectronics has shown exciting promise for high speed optical communication systems. For better system performance and lower cost, monolithic optoelectronic integrated circuits (OEICs) are highly desirable. A novel optoelectronic integration technology for high performance OEICs was …
-
Studio sperimentale di plasmi ECR in regimi stazionari e turbolenti mediante un sistema multidiagnostico: prospettive per investigare i decadimenti beta di interesse nucleare e astrofisico in plasma
… un plasma magnetizzato (riscaldato tramite Electron Cyclotron Resonance (ECR)) confinato da intensi campi magnetici. Le attività sperimentali, condotte presso i INFN-LNS e in collaborazione con i Laboratori ATOMKI, riguardano in particolare lo studio, lo sviluppo e l'impiego di un …
Page 1 of 2