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Showing 1 to 2 of 2 for “"electrical study"”.
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Electrical study of molybdenum in silicon and fluorinated SiO₂ for interlayer dielectrics
… DLTS was used to measure the concentration of electrically active molybdenum. Temperature dependence was investigated by varying annealing temperature and keeping annealing time constant, and time dependence was studied by performing rapid thermal anneals at 750°C and varying annealing time. …
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Complete electrical study of recombination properties of titanium and zinc deep levels in silicon
… samples seem necessary. They permit purely electrical measurements of all relevant band-bound quantum-mechanical transition rates. The data strongly indicate that the dominant energy exchange is through a nonradiative multiphonon mechanism, but the temperature dependence and magnitude of the …