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Showing 1 to 1 of 1 for “"early film growth"”.

  1. Effects of High-Power Impulse Magnetron Sputtering on the Early Growth of Noble Metals on Weakly-Interacting Surfaces

    Reck, Kristian AmandChristian-Albrechts-Universität zu Kiel

    … magnetron sputtering (HiPIMS) influences the early growth of noble-metal thin films on weakly interacting silicon dioxide and polymer substrates. Compared with direct-current magnetron sputtering (DCMS), HiPIMS provides a higher ionized flux fraction and increased ion energy, offering …

    cau-kiel Repository record