Global ETD Search
Search theses and dissertations gathered from participating repositories worldwide. Every result links back to the library that holds it. No account is needed.
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Showing 1 to 2 of 2 for “"e-beam lithographie"”.
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Development of nanofocusing refractive X-ray lenses
According to the results of this work the following conclusions can be made:•The microfabrication process of silicon nanofocusing lenses is optimised. With these lenses a lateral resolution of 50 nm was achieved and this resolution approaches the theoretical limit. Using the same process for the …
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Quantentransport in III-V-Halbleiternanosäulen
… with the help of a high resolution electron beam resist Hydrogen-Silsesquioxan (HSQ). For the top metal semiconductor contact, a novel nonalloyed shallow ohmic contact based on low temperature grown (LTG) GaAs has been developed. HSQ is used also for sample planarization and physical …