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Showing 1 to 2 of 2 for “"dual ion beam sputtering"”.

  1. The Electric, Magnetic and Optical Characterization of Permalloy Oxide Grown by Dual Ion Beam Sputtering

    Compton, Maclyn Stuart2014

    No abstract prepared.

    tdl Repository record

  2. Stress in ion-beam assisted silicon dioxide and tantalum pentoxide thin films

    Sirotkina, N2003

    … thin films, deposited at room temperature by ion-beam sputtering (IBS) and dual ion-beam sputtering (DIBS), and Si02 films, deposited by reactive e-beam evaporation and ion-assisted deposition, were studied. The energy (150-600 eV) and ion-to-atom arrival ratio (0.27-2.0) of assisting argon …

    salford Repository record