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Showing 1 to 1 of 1 for “"dry grown thermal oxides"”.
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Oxide charge traps and interface states at the silicon-silicon dioxide interface
… capacitors were fabricated with 2800 A thick dry grown thermal oxides under various conditions to determine the effects of oxidation parameters on oxide charge trapping. Electrons and holes were injected into the oxides by the VUV-bias method. In this method, electron-hole pairs are created at …