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Showing 1 to 1 of 1 for “"dislocation bowing"”.
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Characterization of a Viscoelastic Response from Thin Metal Films Deposited on Silicon for Microsystem Applications
… with viscous grain boundary slippage and dislocation bowing. In order to investigate this viscoelastic response as a function of metal film composition and thickness, bi-layer torsional hinge actuators consisting of Si with a deposited metal layer were designed to exhibit similar stress …