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Showing 1 to 2 of 2 for “"dialkylamido"”.
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Synthesis, characterization and chemical vapor deposition of transition metal di(tert-butyl)amido compounds
Although the transition metal chemistry of many dialkylamido ligands has been well studied, the chemistry of the bulky di(tert-butyl)amido ligand has been largely overlooked. The di(tert-butyl)amido ligand is well suited for synthesizing transition metal compounds with low coordination numbers; …
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Co-reactant interactions with CVD surfaces: Activation or passivation of growth
… For early transition metal nitrides, reaction of dialkylamido precursors and ammonia follow the transamination reaction pathway for the removal of ligands. However, insufficient ammonia decomposition on surface leads to ligand incorporation in film and a high electrical resistivity. In this work, …