Global ETD Search
Search theses and dissertations gathered from participating repositories worldwide. Every result links back to the library that holds it. No account is needed.
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Showing 1 to 20 of 31 for “"conformality"”.
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METHODS OF AREA-SELECTIVE ATOMIC LAYER DEPOSITION OF A METAL OXIDE USING SMALL MOLECULE INHIBITORS AND COMPETITIVE ADSORPTION
… actively being pursued to overcome scaling and conformality limits of conventional top-down approaches and lower process costs. Area-selective atomic layer deposition (AS-ALD) offers atomic-level control, excellent conformality, and precise pattern definition critical for next-generation device …
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Photoinitiated chemical vapor depostion [sic] : mechanism and applications
… initiated chemical vapor deposition (iCVD) . The conformality of these films in microtrenches is assessed and an analytical model is developed in order to quantify the sticking probability of the initiating radical. Mechanistic insight from these experiments is used to predict the conformality …
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Development of 3D-Printed Patient Specific Bolus For Clinical Use In to tal Scalp Irradiation
… are laborious yet produce bolus with limited conformality and setup reproducibility. The purpose of this study was to develop and validate the use of patient-specific 3D-printed bolus caps for TSI. 3D-printing materials were studied to find materials suitable for use as a bolus cap. Clinical …
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SURFACE SCIENCE APPROACH TO ATOMIC LAYER DEPOSITION CHEMISTRY
… for the growth of solid thin films with high conformality on complex geometries such as heterogeneous catalysts and microelectronic devices. In this work, surface sensitive characterization techniques have been employed to investigate initial precursor-substrate reactions and ALD surface …
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Investigation of layer-by-layer assembly and M13 bacteriophage nanowires for dye-sensitized solar cells
… to coat metal to different degrees of conformality as a function of mesh pore size. The conformality of the coating, in turn, determines which functions it could assume within a LbL-based DSSC.
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Incorporating range uncertainty into proton therapy treatment planning
… to plan and deliver treatments with greater conformality, sparing normal tissue and organs at risk. Radiotherapy treatment plans aim to meet set dosimetric constraints, and meet them at every fraction. Plan robustness is a measure of deviation between the delivered dose distribution and the …
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Amine functionalization by initiated chemical vapor deposition (iCVD) for interfacial adhesion and film cohesion
… well-defined polymer films with tunable conformality and property. In this thesis work, amine functional iCVD poly(4-aminostyrene) (PAS) thin films were synthesized for the first time. The pendant amine groups enable the formation of a robust nanoadhesive with complementary epoxy …
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FUNCTIONAL THIN FILMS BY SPATIAL ATOMIC LAYER DEPOSITION FOR PHOTOVOLTAIC APPLICATIONS
… deposition technique offers good uniformity, conformality and precise film thickness control. The spatial atomic layer deposition technique combines a high throughput with the advantages of conventional atomic layer deposition in obtaining monolayer-by-monolayer growth at a relatively lower …
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Low-Temperature Chemical Vapor Deposition of Ruthenium and Manganese Nitride Thin Films
… materials is needed. Two techniques capable of conformality have emerged: chemical vapor deposition (CVD) and atomic layer deposition (ALD). Here, two processes for deposition of materials which could be useful in microelectronics, but for which no low-temperature, conformal process has been …
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Understanding and Improving Electrode|Polymer Electrolyte Interfaces for High-Voltage Lithium Metal Batteries
… discrepancy between morphological and ionic conformality at interfaces in PEs-based SSBs. In Chapter 3, we demonstrate MICs as a tunable electrolyte platform for enabling high-voltage LMBs. We highlight how compositional tailoring enhances electrochemical stability and cycling performance, …
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Control of Reaction Surface in Low Temperature CVD to Enhance Nucleation and Conformal Coverage
… the surface with remote noble gas plasma. Conformality enhancement is achieved by use of growth inhibitors that lower the sticking probability of the molecules impinging the growth surface.
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An Approach for Conducting Stakeholder Interviews for a Novel Technology, as applied to the Locomotive Industry
… a wide field-of-view while maintaining AR conformality using image-based head tracking. Stakeholders have different backgrounds and expectations, so solicitation and evaluation of opinions is inevitably challenging. However, it is important to factor expert opinions into the AR-HUD design …
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Microfabricated refractory ceramic structures for micro turbomachinery
… in the course of this research show very good conformality and step coverage with a fine (~0.1 [mu]m diameter) columnar microstructure. Surface roughness (Rq) of the films is on the order of 100 nm, becoming rougher with thicker deposition. Residual stress limits the achievable thickness, as …
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Higher-Order Calculations in Quantum Chromodynamics
… Brodsky-Lepage-Mackenzie/Principle of Maximum Conformality (BLM/PMC) method for setting the renormalisation scale, μ_R, in higher-order QCD calculations. We identify three ambiguities in the BLM/PMC procedure and study their numerical impact using the example of the total cross-section for …
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A tale of two studies: Syntheses of silicon nitride chemical vapor deposition precursors and divalent lanthanide N,N-dimethylaminodiboranate complexes
… temperatures as low as 400 °C and with excellent conformality in trenches with aspect ratios up to 3.5:1. Elemental characterization of these films, performed by Auger spectroscopy, show that these films contain Si (~10 %) and N (~10 %) in a 1:1 ratio but have high C (~40 %) and O (~40 %) …
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Chemical vapor deposition of functional and conformal polymer thin films for the formation and modification of nanostructures
… ionic conductivity (10-⁷ S cm-¹) and high conformality. Active materials for supercapacitors were developed using the oxidative chemical vapor deposition (oCVD) of conductive polymers. The oCVD process was used to control the crystallographic texture of poly(3,4-ethylenedioxythiophene) …
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Enabling integration of vapor-deposited polymer thin films
… reactants. The chemical functionality and conformality of the films were unaffected by the change in processing mode. Reaction yield was improved by one to two orders of magnitude for several film chemistries. iCVD is also unique in that it enables the deposition of cross-linked polymer …
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Comparison of high power impulse magnetron sputtering and modulated pulsed power sputtering for interconnect metallization
… of different widths as narrow as 70 nm. The conformality of the Cu film on the trench will be compared using cross-section scanning electron microscopy (SEM). Reduced overhang is achieved using MPP Solo as compared with DC sputtering. More significant improvements have been seen using the MPP …
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Coating and filling of nanometer-scale structures using chemical vapor deposition
… limit, thereby affording a high degree of conformality in the forests. A step coverage of 92 % is achieved when the forest height is 80 µm. In addition to high conformality, HfB2 coating creates strong joints wherever the neighboring CNTs touch each other; this converts the CNT forest with …
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Evaluation of an End-to-End Radiotherapy Treatment Planning Pipeline for Prostate Cancer
… created to ensure hotspot reduction and target conformality.</p> <p>The findings demonstrated that plans developed from automatically generated contours were clinically usable with minor edits for intact and postoperative treatments without lymph node involvement. For treatments with lymph node …
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