Global ETD Search
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Showing 1 to 5 of 5 for “"chip cooling"”.
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Micro-Evaporator Design and Investigation of Phase Change in Tailored Microchannels
… implementation in next generation high heat flux cooling schemes. Promising research has been conducted in the area of MEMS cooling devices, taking advantage of the increased heat transfer characteristics in microfabricated structures. While significant advances in microchannels can be found in …
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On-Chip Isotropic Microchannels for Cooling Three Dimensional Microprocessors
… of three dimensionally independent on-chip microchannels using a CMOS-compatible single mask deep reactive ion etching (DRIE) process for cooling 3D ICs. Three dimensionally independent microchannels are fabricated by utilizing the RIE lag effect. This allows complex microchannel …
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Fabrication of Three-Dimensionally Independent Microchannels Using a Single Mask Aimed at On-Chip Microprocessor Cooling
… of the modeled process for creating a microchip cooling device for high-heat flux applications was also investigated. Using meander channels, heat flux in excess of 100W/cm2 were cooled using 750µL/s flow rate of water through the chip. This single-mask process reduces risk of damage to the …