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Showing 1 to 1 of 1 for “"chalcogenide passivation"”.
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Novel etch studies and passivation techniques on InAs/GaSb superlattice based infrared detectors
… by optimization of mesa delineation and surface passivation techniques. The first part of the dissertation works on the development of optimized etching scheme for the 400μm x 400μm area single-pixel SLS detectors and for 25μm x 25μm area focal plane arrays (FPAs). Firstly, optimization of wet …