Global ETD Search
Search theses and dissertations gathered from participating repositories worldwide. Every result links back to the library that holds it. No account is needed.
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Showing 1 to 1 of 1 for “"capacitance-based quasi-static design"”.
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Electrostatic micro actuators for mirror and other applications
Micro-electro-mechanical systems (MEMS) based electrostatic micro actuators are becoming important building blocks for innovations in optical signal processing and computing systems due to their inherently small size, high density, high speed and low power consumption. Generally, the principle of …