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Showing 1 to 1 of 1 for “"bulk micro mechanic"”.
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Quasistatisch auslenkbarer Kippspiegel zur Ablenkung von Licht
… out of two parts using method's of silicon bulk mikro machining. A deflectable mirror plate, torsional spring's and the surrounding support structure are fabricated within the thin device layer at the top of BSOI material. The counter electrode is manufactured out of a highly doped silicon …