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Showing 1 to 2 of 2 for “"amorphous hydrogenated titanium carbide films"”.

  1. A Study of Amorphous Hydrogenated Titanium-Carbide Films: Structure, Stability, and Role of Hydrogen Doping

    Kaloyeros, Alain E.University of Illinois at Urbana-Champaign1987

    Amorphous hydrogenated titanium carbide films (a-TiC(,x):H(,y), 0.88 < x < 0.95 and 0.05 < y < 0.12) were successfully prepared by low-temperature (150-300(DEGREES)C) and low-pressure (<10('-5) torr) metallorganic chemical vapor deposition (MOCVD) of the organometallic compound …

    uiuc Repository record

  2. A study of amorphous hydrogenated titanium carbide films: Structure, stability, and role of hydrogen doping

    Kaloyeros, Alain Elie2011

    Amorphous hydrogenated titanium carbide films (a-TiC :H , X y 0.88<x<0.95 and O.OS<y<0.12) were successfully prepared by low-temperature (150-300°C) and low-pressure (<10-S torr) metallorganic chemical vapor deposition (MOCVD) of the organometallic compound tetraneopentyl-titanium. X-ray and …

    uiuc Repository record