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Showing 1 to 2 of 2 for “"additive lithography"”.
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Additive Lithography Fabrication And Integration Of Micro Optics
… work we present an innovative technique termed Additive Lithography that makes use of binary masks and controlled partial exposures to sculpt photoresist into the desired optical surface relief profile. We explore various masking schemes for fabricating a variety of optical elements with …
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The design, fabrication, and implications of a solvothermal vapor annealing chamber
… generate nanoscale patterns through the use of additive lithography. The chamber aids in the low-waste production of research and development silicon wafers possessing unparalleled surface resolution and feature density, by way of nanoscale lithography. The concept of this chamber came out of a …