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Showing 1 to 1 of 1 for “"acoustic resonator/filter"”.

  1. ALN/ALSCN Acoustic Resonant Systems Based on Ultra-Thin Piezoelectric Films

    Park, MingyoGeorgia Institute of Technology2022

    … scandium nitride (AlN/AlScN) based acoustic resonant systems. Various microelectromechanical system (MEMS) acoustic resonators — surface acoustic wave (SAW), thin-film bulk acoustic resonator (FBAR), and Lamb wave resonators— were investigated by employing the ultra-thin …

    gatech Repository record